Ideal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Also prevents noise and vibration!
The "ThermoRack1201/1801" is a temperature control chiller that uses no refrigerants and can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it operates while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space
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basic information
【Basic Specifications】 Temperature Range: -10℃ to 80℃ Cooling Capacity: Thermorack1201: 1340W @ 20℃ ThermoRack1801: <High Flow> 1600W @ 20℃ <Medium Flow> 1800W @ 20℃ <Low Flow> 2000W @ 20℃ Heating Capacity: Thermorack1201: 2000W @ 20℃ ThermoRack1801: <High Flow> 3000W @ 20℃ <Medium Flow> 3200W @ 20℃ <Low Flow> 3400W @ 20℃ Material in Contact with Liquid: Aluminum, Stainless Steel, Polymer External Dimensions: L483 × W610 × H221 (mm) *For more details, please refer to the catalog.
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Our solutions are widely adopted in fabs around the world for measures against fluorocarbons, global warming (energy saving), aging infrastructure, and process improvement. We are equipped with communication interfaces compatible with various plasma etching equipment. We have various connection examples available, so please feel free to contact us.
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MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892