iPROS Manufacturing
  • Search for products by classification category

    • Electronic Components and Modules
      Electronic Components and Modules
      56042items
    • Machinery Parts
      Machinery Parts
      71090items
    • Manufacturing and processing machinery
      Manufacturing and processing machinery
      95624items
    • Scientific and Physics Equipment
      Scientific and Physics Equipment
      33089items
    • Materials
      Materials
      34929items
    • Measurement and Analysis
      Measurement and Analysis
      52798items
    • Image Processing
      Image Processing
      14597items
    • Control and Electrical Equipment
      Control and Electrical Equipment
      50355items
    • Tools, consumables, and supplies
      Tools, consumables, and supplies
      62920items
    • Design and production support
      Design and production support
      11759items
    • IT/Network
      IT/Network
      40736items
    • Office
      Office
      13189items
    • Business support services
      Business support services
      32099items
    • Seminars and Skill Development
      Seminars and Skill Development
      5726items
    • Pharmaceutical and food related
      Pharmaceutical and food related
      23959items
    • others
      59854items
  • Search for companies by industry

    • Manufacturing and processing contract
      7354
    • others
      5038
    • Industrial Machinery
      4431
    • Machine elements and parts
      3291
    • Other manufacturing
      2872
    • IT/Telecommunications
      2520
    • Trading company/Wholesale
      2454
    • Industrial Electrical Equipment
      2316
    • Building materials, supplies and fixtures
      1818
    • software
      1645
    • Electronic Components and Semiconductors
      1576
    • Resin/Plastic
      1491
    • Service Industry
      1415
    • Testing, Analysis and Measurement
      1131
    • Ferrous/Non-ferrous metals
      982
    • environment
      702
    • Chemical
      629
    • Automobiles and Transportation Equipment
      559
    • Printing Industry
      506
    • Information and Communications
      436
    • Consumer Electronics
      421
    • Energy
      320
    • Rubber products
      312
    • Food Machinery
      303
    • Optical Instruments
      282
    • robot
      273
    • fiber
      250
    • Paper and pulp
      232
    • Electricity, Gas and Water Industry
      172
    • Pharmaceuticals and Biotechnology
      164
    • Warehousing and transport related industries
      145
    • Glass and clay products
      141
    • Food and Beverage
      133
    • CAD/CAM
      122
    • retail
      111
    • Educational and Research Institutions
      107
    • Medical Devices
      102
    • Ceramics
      95
    • wood
      88
    • Transportation
      83
    • Medical and Welfare
      61
    • Petroleum and coal products
      60
    • Shipbuilding and heavy machinery
      52
    • Aviation & Aerospace
      48
    • Fisheries, Agriculture and Forestry
      39
    • Public interest/special/independent administrative agency
      24
    • self-employed
      23
    • equipment
      22
    • Research and development equipment and devices
      18
    • Mining
      17
    • Government
      16
    • Materials
      16
    • Finance, securities and insurance
      13
    • Individual
      10
    • Restaurants and accommodations
      8
    • cosmetics
      8
    • Police, Fire Department, Self-Defense Forces
      7
    • Laboratory Equipment and Consumables
      3
    • Contracted research
      3
    • Raw materials for reagents and chemicals
      2
  • Special Features
  • Ranking

    • Overall Products Ranking
    • Overall Company Ranking
Search for Products
  • Search for products by classification category

  • Electronic Components and Modules
  • Machinery Parts
  • Manufacturing and processing machinery
  • Scientific and Physics Equipment
  • Materials
  • Measurement and Analysis
  • Image Processing
  • Control and Electrical Equipment
  • Tools, consumables, and supplies
  • Design and production support
  • IT/Network
  • Office
  • Business support services
  • Seminars and Skill Development
  • Pharmaceutical and food related
  • others
Search for Companies
  • Search for companies by industry

  • Manufacturing and processing contract
  • others
  • Industrial Machinery
  • Machine elements and parts
  • Other manufacturing
  • IT/Telecommunications
  • Trading company/Wholesale
  • Industrial Electrical Equipment
  • Building materials, supplies and fixtures
  • software
  • Electronic Components and Semiconductors
  • Resin/Plastic
  • Service Industry
  • Testing, Analysis and Measurement
  • Ferrous/Non-ferrous metals
  • environment
  • Chemical
  • Automobiles and Transportation Equipment
  • Printing Industry
  • Information and Communications
  • Consumer Electronics
  • Energy
  • Rubber products
  • Food Machinery
  • Optical Instruments
  • robot
  • fiber
  • Paper and pulp
  • Electricity, Gas and Water Industry
  • Pharmaceuticals and Biotechnology
  • Warehousing and transport related industries
  • Glass and clay products
  • Food and Beverage
  • CAD/CAM
  • retail
  • Educational and Research Institutions
  • Medical Devices
  • Ceramics
  • wood
  • Transportation
  • Medical and Welfare
  • Petroleum and coal products
  • Shipbuilding and heavy machinery
  • Aviation & Aerospace
  • Fisheries, Agriculture and Forestry
  • Public interest/special/independent administrative agency
  • self-employed
  • equipment
  • Research and development equipment and devices
  • Mining
  • Government
  • Materials
  • Finance, securities and insurance
  • Individual
  • Restaurants and accommodations
  • cosmetics
  • Police, Fire Department, Self-Defense Forces
  • Laboratory Equipment and Consumables
  • Contracted research
  • Raw materials for reagents and chemicals
Special Features
Ranking
  • Overall Products Ranking
  • Overall Company Ranking
  • privacy policy
  • terms of service
  • About Us
  • Careers
  • Advertising
  1. Home
  2. ProductSearch
  3. Control and Electrical Equipment
  4. Environmental Equipment
  5. Other environmental equipment
  6. Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

  • Added to bookmarks

    Bookmarks list

    Bookmark has been removed

    Bookmarks list

    You can't add any more bookmarks

    By registering as a member, you can increase the number of bookmarks you can save and organize them with labels.

    Free membership registration

last updated:Jun 16, 2022

エムエス機器
エムエス機器
  • Official site

This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

    Other semiconductor manufacturing equipmentOther environmental equipment
TR1201.png

Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

TR1201.png
TR1201.png
  • Related Link - https://www.technosaurus.co.jp/products_category/t…

Inquire About This Product

  • Contact Us Online
  • Download catalog

basic information

<ThermoRack 1201 / 1801> Set temperature: -10 to 80℃ / -15℃ to 70℃ Cooling capacity @20℃: 1320W / (H)1600W (M) 1800W 1 (L) 2000W Pump: 14Lpm@0.21MPa External dimensions (WxDxH) mm: 483 x 610 x 221 <Thermo Cube> Set temperature: 5 to 50℃ (optional -5℃ to 65℃) Cooling capacity @20℃: 200W to 600W@20℃ (6 models) Pump: 1Lpm@0.24MPa to 3Lpm@0.2Mpa (9 types) External dimensions (WxDxH) mm: 280 x 320 x 320 <NIKOLA3K / 5K> Set temperature: -10 to 80℃ Cooling capacity @20℃: (3K) 3000W / (5K) 5000W Pump: 38Lpm@0.55MPa External dimensions (WxDxH) mm: 566 x 711 x 897 <M-75HFE> Set temperature: -15 to 35℃ Cooling capacity @20℃: 1600W Pump: 11Lpm@0.42MPa External dimensions (WxDxH) mm: 413 x 610 x 664

Price range

Please contact us for details

Delivery Time

Please contact us for details

Applications/Examples of results

<Application> - Dry etching - Tester - Stepper - Electromagnet - Electron beam - Laser device

catalog(5)

Download All Catalogs
Peltier Cooler Product Comprehensive Catalog

Peltier Cooler Product Comprehensive Catalog

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

ThermoRack 1201

ThermoRack 1201

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

ThermoRack 1801

ThermoRack 1801

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Peltier Chiller NIKOLA 3K / 5K

Peltier Chiller NIKOLA 3K / 5K

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

Fluorine-based solvent chiller M-75HFE

Fluorine-based solvent chiller M-75HFE

PRODUCT
  • E-book viewing
  • Catalog download

Contact this catalog

News about this product(1)

Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>

  • Product news

Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.

Added to bookmarks

Bookmarks list

Bookmark has been removed

Bookmarks list

You can't add any more bookmarks

By registering as a member, you can increase the number of bookmarks you can save and organize them with labels.

Free membership registration

Companynews list (11)

Company information

エムエス機器

エムエス機器

Industrial Machinery

Added to bookmarks

Bookmarks list

Bookmark has been removed

Bookmarks list

You can't add any more bookmarks

By registering as a member, you can increase the number of bookmarks you can save and organize them with labels.

Free membership registration
  • Official site
Phone number/address

MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892

Product/Service List (54)

The related categories of Other semiconductor manufacturing equipment

  • Control and Electrical Equipment
  • Environmental Equipment
  • Other environmental equipment
  • Manufacturing and processing machinery
  • Semiconductor Manufacturing Equipment
  • Other semiconductor manufacturing equipment
          

Inquire About This Product

  • Contact Us Online
  • Download catalog

Products

  • Search for Products

Company

  • Search for Companies

Special Features

  • Special Features

Ranking

  • Overall Products Ranking
  • Overall Company Ranking

support

  • site map
IPROS
  • privacy policy Regarding external transmission of information
  • terms of service
  • About Us
  • Careers
  • Advertising
COPYRIGHT © 2001-2025 IPROS CORPORATION ALL RIGHTS RESERVED.
Please note that the English text on this page is automatically translated and may contain inaccuracies.