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  1. Home
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  3. エムエス機器
  4. Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>
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  • Aug 08, 2022
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Aug 08, 2022

Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>

エムエス機器 エムエス機器
Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.
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Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

  • Other semiconductor manufacturing equipment
  • Other environmental equipment

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Related catalog(5)

Peltier Cooler Product Comprehensive Catalog

Peltier Cooler Product Comprehensive Catalog

PRODUCT
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ThermoRack 1201

ThermoRack 1201

PRODUCT
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ThermoRack 1801

ThermoRack 1801

PRODUCT
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Peltier Chiller NIKOLA 3K / 5K

Peltier Chiller NIKOLA 3K / 5K

PRODUCT
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Fluorine-based solvent chiller M-75HFE

Fluorine-based solvent chiller M-75HFE

PRODUCT
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エムエス機器
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【1/26 OPEN!】Transceiver & Smartphone Rental Shop

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As the new year begins, I would like to extend my heartfelt congratulations on your continued prosperity. I sincerely appreciate your exceptional support throughout the year. This is the STJ Group (Santelecom Japan, STJ Rentec). Now, I am pleased to announce that we will be opening our "Transceiver & Smartphone Rental Shop" simultaneously at three locations nationwide on January 26 (Monday)! ■ List of Services to be Offered - Same-day pickup/return of rental equipment - Usage explanations and demonstrations of rental equipment - Wireless solutions consultation desk - Mobile BPO service counter As a special promotion to celebrate the opening of the rental shop, we are currently running a special price campaign for picking up rental equipment at the shop! For more details, please contact us!

Dec 26, 2025

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Notice of Year-End and New Year Holidays

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【Notice of Year-End and New Year Holidays】 Thank you very much for your continued support. Our company will be closed for the year-end and New Year holidays as follows: Holiday Period: Saturday, December 27, 2025 – Sunday, January 4, 2026 Please note that inquiries and orders received during the holiday period will be addressed sequentially starting from Monday, January 5, 2026. We apologize for any inconvenience this may cause and appreciate your understanding.

Dec 26, 2025

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The first 10,000 people will receive a 500 yen Amazon gift card as a gift.

Notice of Participation in IT Trend EXPO 2026 Spring

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We would like to inform you about our participation in the IT Trend EXPO 2026 Spring. 《Exhibition Information》 With the concept of "New encounters will change tomorrow's work," one of the largest online exhibitions in the industry will be held. NTT TechnoCross will exhibit in the Human Resources Comprehensive category. We have prepared numerous discussions and sessions featuring special guests who are active on television, allowing even those who are usually busy to efficiently gather information on products and services related to IT and DX. Additionally, the first 10,000 participants will receive a 500 yen Amazon gift card. Please apply early. 《Exhibition Overview》 March 3 (Tuesday) to March 7 (Saturday), 2026, online (free: pre-registration required) 《Participation Application》 https://it.expo.it-trend.jp/key/opl7kgdj *Please apply (free) from the "Receive Ticket / Proceed to Participation Registration" link at the above URL.

Dec 26, 2025

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The TV commercial "What Will the New Era Bring?" featuring Akane Hotta will start airing on December 26.

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The TV commercial "What Will You Do in the New Era?" featuring model and actress Akane Horita will begin airing on December 26, 2025. This work expresses the desire of Tokei Densan to respond to the diverse needs of various industries in today's society, where new technologies, such as the expansion of the AI market, are competing with each other, and to nurture and blossom our customers' futures. Please pay attention to Akane Horita, who is dressed in stylish outfits, listening to the concerns of the target audience and offering support. # CM Overview Title: "What Will You Do in the New Era?" (30 seconds / 15 seconds) CM URLs 30 seconds: https://youtu.be/y_lMs0HRj3w 15 seconds: https://youtu.be/egpzMfh8Kok

Dec 26, 2025

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Notice of Year-End and New Year Holidays

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  • COMPANY

Thank you very much for your continued support. We would like to inform you that our company will be closed for the year-end and New Year holidays as follows: Year-end and New Year holiday period: December 27, 2025 (Saturday) to January 4, 2026 (Sunday) We apologize for any inconvenience this may cause and appreciate your understanding. *Please note that inquiries made through our website will also be responded to after January 5, 2026 (Monday).

Dec 26, 2025

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  • 売れ筋機種限定の即納企画 各機種10台限定 最短1週間納品
  • 分解能 100~4,000P/R 出力方式 ラインドライバ出力/オープンコレクタ出力 税別9,500円~16,600円 ロータリーエンコーダ
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