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  1. Home
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  3. エムエス機器
  4. Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>
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  • Aug 08, 2022
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Aug 08, 2022

Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>

エムエス機器 エムエス機器
Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.
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Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

  • Other semiconductor manufacturing equipment
  • Other environmental equipment

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Related catalog(5)

Peltier Cooler Product Comprehensive Catalog

Peltier Cooler Product Comprehensive Catalog

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ThermoRack 1201

ThermoRack 1201

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ThermoRack 1801

ThermoRack 1801

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Peltier Chiller NIKOLA 3K / 5K

Peltier Chiller NIKOLA 3K / 5K

PRODUCT
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Fluorine-based solvent chiller M-75HFE

Fluorine-based solvent chiller M-75HFE

PRODUCT
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エムエス機器
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Free registration for attendance here" Decision to exhibit at the 40th Nepcon Japan! "January 21-23, 2026

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Yoshikawa Co., Ltd. Realization Division will exhibit at the 40th Nepcon Japan. ■ Dates: January 21 (Wed) - 23 (Fri), 2025 ■ Venue: Tokyo Big Sight ■ Booth: East Hall 4 E6-19 Clean and Static Control Zone The exhibit will feature a storage shelf for slide-type metal masks. 【Efficient storage with a sliding mechanism】 【Easy to take out even while wearing gloves】 【Customization to meet the needs of individual customers】 We invite you to come and see it. ■ Pre-registration (free) is available here or through related links: https://www.nepconjapan.jp/tokyo/ja-jp/register.html?code=1522511758302164-EUA

Nov 12, 2025

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■■ Air Leak Tester | FLA-0200 / FLA-0201 series ■■ Fukuda's new flagship model. Equipped with mastering correction function, it enables high-precision measurements in a short time.

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Fukuda's new flagship model. - Masterless type (FLA-0200 series) - General type (FLA-0201 series) Two models of air leak testers. With the mastering correction function, high-precision measurements can be achieved in a short time. Please take a look at the catalog.

Nov 12, 2025

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PFAS Regulation Countermeasures! ■■ Leak Test Equipment for Small Electronic Components|MSA-0101 series ■■ Does not use fluorinated inert fluids. PFAS-free. Offers accuracy equal to or better than liquid immersion testing.

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● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!

Nov 12, 2025

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[Cast Iron Crack] We will repair cracks in metal products without applying heat.

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  • CATALOG

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Nov 12, 2025

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240 well 2D code attached tube

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  • PRODUCT

The "240well 2D Code Attached Tube" is a product with a 200μl type and a rack lid lock function. It is compatible with liquid nitrogen vapor. It allows for the storage and management of a large number of samples in a small space, making it easier to understand. Additionally, it does not use sealing materials, which improves sealability and allows for safer use. 【Features】 ■ Developed a 2D code attached tube for ultra-micro volumes (200μl) ■ Compatible with liquid nitrogen vapor ■ Adopts a new type of screw cap that does not use O-rings, packing, or gaskets ■ Improved sealability and safer use due to the absence of sealing materials *For more details, please download the PDF or feel free to contact us.

Nov 12, 2025

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  • 新たな発想が、ここで起動する。 課題解決に導くモーションシステムイベント MOTION MIRAI PARK 2025.12.11 Thu~12 Fri 東京国際フォーラム
  • スマートファクトリーJAPAN 2025出展 会期12/3(水)~5(金) 会場 東京ビッグサイト 南ホールF-22
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