ATSジャパン List of Products and Services

The "GX-20" is a natural refrigerant chiller that does not use high GWP refrigerants, including alternative fluorocarbons. With improvements in high-efficiency motors and controls, it reduces power consumption and minimizes installation space with a smaller size. Additionally, it allows for a wide temperature control range from -20°C to +70°C. Please feel free to contact us if you have any inquiries. 【Features】 ■ Uses carbon dioxide (CO2) as a refrigerant ■ 20% energy savings through the use of high-efficiency motors ■ Wide temperature control range: -20°C to +70°C ■ Space-saving: 8% reduction in installation area compared to MX-20 *For more details, please refer to the PDF materials or feel free to contact us.

• Cooling system

We would like to introduce the "SX Series" single-channel chiller from ATS Japan Co., Ltd., which pursues high cooling capacity and rapid heating and cooling. ■ High cooling capacity ■ Improved throughput due to rapid heating and cooling ■ Enhanced efficiency and energy savings through improvements in the jug! ■ Compatible with high-temperature cooling water (+30°C) ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on thousands of installations to date, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us first.

• Etching Equipment
• Heating device
• Temperature and Humidity Control

This is a notice about the "MX Series," one of the main products from ATS Japan Co., Ltd. ■ Compared to conventional chillers, power consumption is reduced by one-third. ■ Detects thermal load and automatically switches from idling operation to load operation to suppress heater output. ■ Idling operation reduces the waste heat from the refrigeration unit and the amount of cooling water used. ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on thousands of units installed to date, we can customize solutions for other industries such as food, medical, and scientific sectors according to your needs. We will propose the optimal solution based on your usage environment and application. Please feel free to contact us first.

• Temperature and Humidity Control
• Heating device
• Etching Equipment

This is a notice from ATS Japan Co., Ltd. regarding the multi-channel chiller "EN Series." ■ Up to 4 types of modules can be combined (-70℃ to +200℃) ■ Compatible with various circulating fluids ■ Supports various interfaces ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on thousands of installations to date, we can also customize solutions for other industries such as food, medical, and physical sciences according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us first.

• Temperature and Humidity Control
• Etching Equipment
• Heating device

We would like to introduce the high-temperature model "HTX Series" from ATS Japan Co., Ltd. ■ With enhanced safety features, it can be safely used up to 180°C! ■ Powerful operation with high cooling capacity (22kW@180°C) ■ Energy-saving achieved with rapid heating ■ Convenient for maintenance with rapid cooling ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on our experience with thousands of installations, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution based on your usage environment and application. Please feel free to contact us first.

• Temperature and Humidity Control
• Etching Equipment
• Heating device

We would like to introduce the "ESL Series" multi-channel chiller, which combines energy efficiency and energy saving, from ATS Japan Co., Ltd. ■ A model with excellent energy efficiency thanks to hot gas bypass ■ The dual-channel model allows one chamber to be handled by a single unit! ■ Slim body with a width of 450mm ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on our experience with thousands of installations, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us.

• Temperature and Humidity Control
• Heating device
• Etching Equipment