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  5. Temperature and Humidity Control
  6. [Chira] The ESL-60 series, pursuing efficiency and energy saving.

[Chira] The ESL-60 series, pursuing efficiency and energy saving.

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ESL-60/ESL-60TV

last updated:Feb 20, 2012

ATSジャパン
ATSジャパン
  • Official site

A new temperature management system that combines "efficiency" and "savings."

We would like to introduce the "ESL Series" multi-channel chiller, which combines energy efficiency and energy saving, from ATS Japan Co., Ltd. ■ A model with excellent energy efficiency thanks to hot gas bypass ■ The dual-channel model allows one chamber to be handled by a single unit! ■ Slim body with a width of 450mm ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on our experience with thousands of installations, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us.

    Etching EquipmentHeating deviceTemperature and Humidity Control
ESL-60.jpg

[Chira] The ESL-60 series, pursuing efficiency and energy saving.

ESL-60.jpg
ESL-60.jpg
  • Related Link - http://www.atschiller.com/esl.html

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basic information

【Features】 ○ Achieves energy efficiency through hot gas bypass ○ Dual channel ○ Equipped with a user-friendly touch panel display ○ Reduction in power consumption (from 60A to 30A) ○ Compatible with various interfaces (analog/digital) ○ Slim body with a width of 450mm for a reduced footprint ○ Complies with SEMI S2, F47, and has CE marking self-declaration ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

Temperature control for semiconductor manufacturing equipment, other industrial machinery, measuring instruments, food processing equipment, and scientific instruments.

Line up(3)

Model number overview
ESL-60S Single channel model
ESL-60T Dual channel model (ch1: -10℃ to +60℃) (ch2: +30℃ to +80℃)
ESL-60TV Dual channel model (ch1: -10℃ to +60℃) (ch2: +30℃ to +40℃)

catalog(1)

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ESL-60 Series Catalog

ESL-60 Series Catalog

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News about this product(2)

EN-400AR

Ipros Ranking / Featured Page Now Available! [Eco Chiller EN Series that Can be Rack Mounted Without Using Fluorocarbons]

  • Product news

We have also been featured in product rankings. Here is an introduction to our non-fluorinated chiller that uses no refrigerants and is gaining attention rapidly. Zero global warming potential! Zero ozone depletion potential! It can be used for applications such as semiconductor devices, medical devices, and laser devices. ***Also featured on the medical industry special page!*** 【Features】 - Non-fluorinated chiller that does not use refrigerants - Both cooling and heating functions available using only electronic power - Energy-saving type without a heater - Choice of circulating fluid! - Various combinations of wattages are possible - Leak-free pump - Low vibration and low noise - Rack mountable (EN-400AR) ATS Japan Co., Ltd.'s chillers have a proven track record of thousands of installations, primarily in the semiconductor industry. Customization is also possible for use in other industries such as food, medical, or scientific fields according to your needs. We will propose the optimal chiller tailored to your usage environment. Please feel free to contact us first.

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DEX-20A

[Temperature Management System (Chiller)] Long-selling DEX Series of ATS brand

  • Product news

This is an introduction to one of ATS Japan's flagship products, the "DEX Series." ● Wide temperature range (-30℃ to +90℃) ● Leakless magnetic pump ● Stackable (two-tier) compatible ● Central monitoring system compatible (optional) Our long-selling model has a proven track record of thousands of chiller installations, primarily in the semiconductor industry. We also offer optimal solutions tailored to the usage environment and applications for other industries such as food, medical, and scientific fields. Please feel free to contact us for more information.

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Company information

ATSジャパン

ATSジャパン

Industrial Machinery

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ATS Japan is fully funded by B/E Aerospace in the United States and offers proposals for chillers tailored to our customers' needs. B/E Aerospace is a company that provides many products and solutions for the aviation industry, including refrigeration systems for aircraft galleys. We inherit their high level of technology and quality, and our manufacturing bases and support services cover not only Japan but also Asia, America, and Europe, ensuring that you can confidently implement our solutions at overseas locations. In addition to thousands of units delivered in the semiconductor industry, we have recently expanded our use into other sectors, such as the scientific field. Customization is possible regardless of the size of the unit, whether it is water-cooled or air-cooled, depending on the equipment and purpose you require. We are committed to providing the optimal chiller solutions for our customers, so please feel free to consult with us. ★Reliability is our commitment★

Product/Service List (6)

The related categories of Etching Equipment

  • Control and Electrical Equipment
  • Process Control Equipment
  • Temperature and Humidity Control
  • Scientific and Physics Equipment
  • Heating equipment/furnace
  • Heating device
  • Manufacturing and processing machinery
  • Semiconductor Manufacturing Equipment
  • Etching Equipment
          

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