Industrial Machinery

テクノロジーリンク

number of employees2
addressTokyo/Toshima-ku/6th floor, Nukariya Building, 1-16-20 Nanchikubo,
phone03-6871-9536
last updated：
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テクノロジーリンク List of Products and Services

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X-LRM Series Precision Electric Stage

Compact, low-profile, high-rigidity, high-precision linear stage

- Stroke length is 25 to 200 mm - Excellent rigidity and thermal stability due to hardened steel materials and recirculating ball bearing guides - The built-in rotary encoder type (X-LRM-E) features slip/stall detection and automatic recovery functions through motor encoder position feedback - The built-in linear encoder type (X-LRM-DE) includes slip/stall detection and position correction functions with a linear encoder resolution of 50 nm - Positioning accuracy within 15 μm for a 200 mm stroke (built-in linear encoder type) - High rigidity stage with a load capacity of 50 kg - Built-in controller, capable of daisy-chaining with other Zaber products

  • Transport and handling robots
  • Substrate transport device (loader/unloader)
  • Other assembly machines

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