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  6. X-LRM Series Precision Electric Stage

X-LRM Series Precision Electric Stage

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X-LRM Series

last updated:Nov 18, 2016

テクノロジーリンク
テクノロジーリンク
  • Official site

Compact, low-profile, high-rigidity, high-precision linear stage

- Stroke length is 25 to 200 mm - Excellent rigidity and thermal stability due to hardened steel materials and recirculating ball bearing guides - The built-in rotary encoder type (X-LRM-E) features slip/stall detection and automatic recovery functions through motor encoder position feedback - The built-in linear encoder type (X-LRM-DE) includes slip/stall detection and position correction functions with a linear encoder resolution of 50 nm - Positioning accuracy within 15 μm for a 200 mm stroke (built-in linear encoder type) - High rigidity stage with a load capacity of 50 kg - Built-in controller, capable of daisy-chaining with other Zaber products

    Substrate transport device (loader/unloader)Transport and handling robotsOther assembly machines
group_x-lrm-e.jpg

X-LRM Series Precision Electric Stage

group_x-lrm-e.jpg
group_x-lrm-e.jpg
  • Related Link - http://www.technology-link.jp/article/15490081.htm…

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basic information

Stroke lengths: 25, 50, 100, 250, 200mm Initial resolution: 0.047625 µm Positioning accuracy: 8 µm Maximum speed: 25 mm/s Minimum speed: 0.000029 mm/s Speed resolution: 0.000029 mm/s Maximum thrust: 50 N Maximum continuous thrust: 25 N Communication interface: RS-232 Communication protocol: Zaber ASCII (default), Zaber Binary Maximum central load: 500 N Maximum allowable load: 1500 N-cm Maximum current consumption: 350mA Power supply: 24-48VDC Distance moved per motor revolution: 0.6096mm Steps per motor revolution: 200 Motor type: 2-phase stepper motor Inductance: 3.5 mH/phase Mechanical drive method: Precision-grade lead screw Limit or home detection: Magnetic Hall sensor Operating temperature range: 0 to 50℃ Stage parallelism: < 10µm RoHS compliant CE marking compliant Pitch stiffness: 750 N-m/deg Roll stiffness: 550 N-m/deg Yaw stiffness: 400 N-m/deg

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Delivery Time

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※Within 3 weeks

Applications/Examples of results

XY Calibration Table Infrared Sensor Inspection Temperature Measurement Sensor Positioning Laser Triangulation Adjustment In-Situ Measurement Mass Spectrometer Optical Inspection Device Position of CCD and Photomultiplier Tube

Line up(3)

Model number overview
X-LRM
X-LRM-E Built-in rotary encoder type Slip/stall detection function
X-LRM-DE Built-in linear encoder type Full closed-loop control

Company information

テクノロジーリンク

テクノロジーリンク

Industrial Machinery

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Technology Link is a high-tech trading company that provides cutting-edge scientific instruments and supports users in solving problems and achieving success in their research and industrial fields with advanced technological capabilities. We mainly sell high-end equipment, including high-precision motion control devices in the atmosphere, ultra-high vacuum (UHV), and optics, and have established a solid position as a trading company with many years of rich achievements, experience, and high recognition and reliability.

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