Industrial Machinery

昭和真空

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addressKanagawa/Sagamihara-shi Chuo-ku/Tana 3062-10
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昭和真空 List of Catalogs

1～32 item / All 32 items

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Fundamentals of Vacuum

Technical data・examples

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What is sputtering?

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Vacuum Deposition Device Mega-Sapio 1700

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Energy-saving unit for oil diffusion pumps ECO-22/26

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Plasma-resistant film deposition device SEC-S1300i

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"A substrate is covered with a membrane that is not just precise." Atomic Layer Deposition Device ALD-Series

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Low-temperature film formation possible - Load-lock type carousel sputtering device SPC-2507 model

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Productivity improvement and labor saving Road lock type pass-through sputtering device SPH-2410-2

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Hall accelerator ion source / Plasma bridge neutralizer ISH-030/PBN-80

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Inline High Vacuum Annealing Device SAF-X1201

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Predictive Maintenance Edge Computing System EPIoT

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Wireless temperature monitor

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For stable film thickness control: Quartz monitor COÅT LEADER

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[For customers who want to quickly and automatically sputter on resin substrates] SPP-SERIES

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【Contributing to Precision Processing】Wafer Trimming Device SST-M01T Type

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For substrate surface treatment, Plasma Cleaner SPE-2136A

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Essential Equipment for Automation: Inline Frequency Adjustment Device Model SFE-X2012

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[For customers who want to sputter resin substrates quickly and automatically] SPP-SERIES

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If transitioning from Al film to DBR film, Sapio-DBR.

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Stable film thickness and low particle count optical thin film deposition equipment Sapio1300/1550

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"Mass sealing processing of quartz devices with Au/Sn" Vacuum heating sealing device SLS-401T type

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【Astonishing Reproducibility!】Optical Thin Film Deposition Device SGC-S1700 Series

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Holocassette Ion Plating Device SIH-400T

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"Double-sided film formation capable load lock sputtering device" SPH-2500-2

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【Space-saving and easy to install】Vacuum deposition device SEC-06D/08C

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Arc discharge type ion plating device SIA-400T for the formation of surface hardening films.

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High Output, Wide Range Ion Source - ISG Series

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Efficient heating treatment in an independent operating processing room - High vacuum annealing device SAF-52T-2

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"Vertical incidence is our specialty" Vacuum deposition device SEC-22C

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Ion Plating Device SIP-1600 - Ideal for Decoration and Coating

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Showa Vacuum's Masterpiece: Road Lock Type Frequency Adjustment Device SFE-B03-2

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Energy-saving unit for oil diffusion pumps "ECO-22"

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