SCREEN SPEサービス List of Products and Services

The new technology "Heat Pump Dynamics" not only recovers heat from outside air using heat pump technology but also utilizes proprietary technology to recover and merge waste heat within the device, generating a powerful heat pack. It is fully utilized in coolers, heaters, and humidifier heaters. In medium to large air conditioning systems, the need for separate heat source units (chillers, boilers, electric heaters) is eliminated, reducing electricity consumption and running costs. Efforts are being made to consider the environment through air conditioning systems towards achieving carbon neutrality by 2050. 【Features】 ■ Capable of reducing electricity consumption and running costs by up to 80% compared to conventional systems (according to our estimates). ■ Flexible system configuration for various target areas through combinations of air conditioning unit models. Models for small areas are also available. ■ Promotes a green environment by eliminating fossil fuel use through boiler-less operation and reducing direct CO2 emissions. ■ Precision air conditioning that achieves high-accuracy temperature and humidity control. ■ In medium-sized models, it can be utilized in various scenarios in conjunction with clean booths. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• air conditioning
• Other air conditioning equipment

Sebapron" is a chemical-resistant apron worn over work clothes and dust-proof garments. Essential for hazardous chemical work! It is standardly adopted by many semiconductor-related companies and chemical handling businesses. The "integrated top and bottom design" balances safety and workability. The leg portion is designed like pants, ensuring safety around the feet during low-height work. Made from materials that excel in both chemical resistance and breathability, significantly reducing stress for the worker. Combining it with a "hood" and "over-shoes" made from the same chemical-resistant fabric is also effective. The soft fabric improves the burden of work in tight spaces. 【Features】 ■ High chemical resistance against hazardous chemicals (see attached data) ■ Made from breathable PTFE material, reducing stress ■ "Integrated top and bottom design" considering safety and workability ■ The "SEBAPRO-Hi Lab" with a chef's coat design fits laboratory environments ■ Effective when combined with "hood" and "over-shoes

• Other safety and hygiene products

The performance of the hot plate is a crucial factor that determines the accuracy of the photolithography process. In particular, in advanced processes that require high uniformity of film thickness, line width, and film quality, as well as in process development with temperature-sensitive materials, the performance of the hot plate becomes a significant factor in assessing process performance. The timer-controlled pin-up mechanism enables precise time management, allowing for uniform thermal treatment between wafers. In addition to the standard 250°C model, a high-temperature 350°C model is also available. Furthermore, if uniform cooling is required before and after processing, a tabletop cool plate can also be used. 【Features】 ■ High precision in in-plane temperature uniformity. ■ Timer control reduces wafer-to-wafer variation. ■ Compatible with 3 to 8-inch wafers. ■ Proximity balls ensure a uniform gap. ■ The high-temperature 350°C model is equipped with a burn prevention cover. ■ Tabletop cool plates for air cooling and water cooling are also available. *For more details, please refer to the PDF materials or feel free to contact us.

• Other semiconductor manufacturing equipment
• Heating device

The "Clean Bench" provides an easy way to secure a clean working space. It offers two types of airflow: a horizontal flow that moves clean air from the front to the back, and a vertical airflow that flows downward from the ceiling. It maintains a Class 100 cleanliness level in the workbench area. It is effective for performing table work in a clean environment or temporarily placing parts in a clean environment. 【Features】 ■ Easily secure a clean working space ■ Two types of airflow: horizontal flow and vertical airflow ■ Concentrated maintenance of Class 100 cleanliness in the workbench area *For more details, please refer to the PDF materials or feel free to contact us.

• Clean bench

The "JH-72S-SBX/JH-96S-SBX/JH-144S-SBX" is a pure water heating unit that supplies pure water by heating and pressurizing it. It achieves a space-saving design with a 2-in-1 configuration. Additionally, with the pressurization feature, it can be installed in a sub-fab, creating space in the cleanroom. Thanks to its unique quartz tank structure and control mechanism, it has a quick heating start and an energy-saving design. It is compact and does not take up much space, and with the pressurization feature, it can provide stable supply without being affected by pressure fluctuations on the primary side, even in environments where pure water pressure is insufficient. We offer a wide range of products, including pure water heating units without the pressurization feature. 【Features】 ■ Equipped with a pressurization function (optional) ■ Can be installed in limited spaces ■ Contributes to reducing investment costs ■ Energy-saving design with quick heating start due to unique quartz tank structure and control mechanism ■ Clean design using quartz glass for the heating container and fluororesin for the main piping sections *For more details, please refer to the PDF materials or feel free to contact us.

• Other physicochemical equipment

By introducing a pure water booster unit, we can eliminate issues related to insufficient or fluctuating pure water supply pressure! This enables stable process handling. Stable supply of pure water is a crucial factor that affects quality and yield in device production. This boosting function can also be integrated into static electricity prevention units and pure water heating units, reducing installation space. 【Features】 ■ Control of stable pressure through feedback functionality with constant monitoring. ■ Adoption of a magnetic levitation centrifugal Levtronics pump without bearings, achieving high durability. ■ Realization of stable supply without pulsation. ■ A range of product models available to accommodate various supply flow rates. ■ Compatibility with the communication specifications of the supplied devices. *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• Flow Control

We contribute to the stable operation and productivity improvement of our customers' manufacturing lines, from optimizing and modifying process equipment to providing various peripheral devices within the factory. In recent years, with the increasing performance and diversification of electronic devices, optimizing the manufacturing environment has become increasingly important. SCREEN SPE Services is advancing proposals for reliable solutions based on technical information shared within the SCREEN Group. For more details, please contact us or download the catalog.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment
• Other clean room equipment and facilities