ハイテクノサービス List of Products and Services

We offer a variety of maintenance and overhaul services, including "robot replacement work such as ASM･PXJ-200." After maintenance and adjustments of semiconductor and CVD-related equipment, we print out and attach the measurement results using a high-resolution digital oscilloscope. We also flexibly respond to customization, settings, and relocation setup for equipment whose manufacturer support has ended. Please feel free to consult us. 【Service Overview】 ■ Robot replacement work (FANUC) such as ASM･PXJ-200 ■ Overhaul and maintenance of robot-related equipment for ASM･PXJ-200 and PXX-200 ■ Maintenance and settings for ASM's Eagle-10 and various equipment from Denki Kogyo ■ Maintenance, customization, and settings for semiconductor and CVD-related equipment *For more details, please refer to the PDF document or feel free to contact us.

• Calibration and repair

The "Process Controller for Semiconductor Manufacturing Equipment" is an original product installed in our vertical low-pressure CVD system "HG-21." It can be widely applied to various fields such as industrial equipment, medical, and agriculture. Process conditions can be easily changed from a PC. It can also be applied to many devices controlled by DI, DO, AI, and AO, making it highly useful for various research and development equipment. 【Features】 ■ Installed in our vertical low-pressure CVD system "HG-21" ■ Graphically controls various devices and PLCs ■ Easily change process conditions from a PC ■ Applicable to many devices controlled by DI, DO, AI, and AO ■ Highly useful for various research and development equipment *For more details, please refer to the PDF document or feel free to contact us.

• Other process controls

Supports various uses such as vertical type, sheet, wafer size, gas type, and footprint. This is a high-grade vertical reduced pressure CVD system focused on versatility. It can also be customized based on standard specifications to be manufactured at a lower cost. 【Features】 ■ Supports wafer sizes of 3", 6", and 8" with a small footprint ■ Reduces natural oxidation with heater lifting function ■ Achieves stable temperature control from room temperature to 900℃ *For more details, please contact us or download the PDF for more information.

• Other semiconductor manufacturing equipment