ギガフォトン List of Products and Services

The "G300K" is a processing excimer laser light source that consolidates the technology and know-how obtained from our company's manufacturing of KrF excimer lasers for semiconductor lithography. In the semiconductor backend process, it enables processing on substrates that require small vias (10μm) and trench processing, and its application to advanced substrates is anticipated in the future. [Example of processable materials] Interlayer insulating materials / solder resist, among others.

• Other semiconductor manufacturing equipment

"GIGANEX" is an advanced excimer laser that consolidates the technology and know-how obtained from our excimer laser manufacturing for semiconductor lithography. It is expected to be applied in fields such as FPD manufacturing processes, flexible device manufacturing processes, and semiconductor manufacturing processes. 【Characteristics】 ■ Short wavelength (248nm, 351nm) ■ High output (120W to 600W) ■ High frequency (4000Hz to 6000Hz) *For more details, please download the PDF or feel free to contact us.

• Laser marker