エクサ List of Products and Services

The "EDH" is a fluoropolymer heater made entirely of PFA and PTFE in the wetted parts. The standard capacities range from 1KW to 5KW, and it can be manufactured to match the shape of the processing tank. Other specifications can also be produced. It can be used for high-purity semiconductor chemicals, ultra-pure water, pure water, chemical agents, plating applications, and experimental equipment. 【Features】 ■ Wetted parts are made entirely of PFA and PTFE ■ Manufactured to match the shape of the processing tank ■ Standard capacities range from 1KW to 5KW ■ Custom specifications can also be produced *For more details, please refer to the PDF document or feel free to contact us.

• Other heaters

We would like to introduce our "Fluororesin Heat Exchangers." Our lineup includes the shell-and-tube heat exchanger "EM-S type," the flat immersion heat exchanger "EM-U type," and the cylindrical immersion heat exchanger "EM-R type." Based on many years of experience, we provide heat exchangers suitable for various applications, designed to leverage the properties of fluororesin. 【Standard Models】 ■ EM-S type Shell-and-tube heat exchanger ■ EM-U type Flat immersion type (installed in tank) ■ EM-R type Cylindrical immersion type (installed in tank) *For more details, please refer to the PDF document or feel free to contact us.

• Heat exchanger

The "ECN" is an inline chemical heating heater for semiconductor chemical cleaning equipment that uses PFA for all wetted parts. It is equipped with a built-in heater overheat alarm sensor and a liquid leak sensor, ensuring that the temperature rise during sudden shutdowns, such as power outages, is around 10°C, and it is resistant to flow fluctuations and shocks. Additionally, its compact design allows for easy installation, and the electrical control can effectively utilize existing setups. 【Features】 ■ All wetted parts are made of PFA ■ Low-temperature heater specification prevents chemical degradation ■ Built-in heater overheat alarm sensor and liquid leak sensor ■ Resistant to flow fluctuations and shocks ■ Easy installation due to compact design *For more details, please refer to the PDF document or feel free to contact us.

• Other heaters

"EXS" is an inline liquid heating heater for semiconductor chemical cleaning equipment. All wetted parts are made of PFA, designed with low watt density for long life. It can be used with ultra-pure water, alkaline solutions, and acidic solutions. Additionally, it is compact, making installation easy, and can be installed vertically or horizontally. 【Features】 ■ All wetted parts are made of PFA ■ Designed with low watt density for long life ■ Usable with ultra-pure water, alkaline solutions, and acidic solutions ■ Compact design for easy installation ■ Can be installed vertically or horizontally *For more details, please refer to the PDF document or feel free to contact us.

• Other heaters

The "EHS-type ultra-pure water heating inline heater" is a semiconductor inline heater made of fluororesin, using PFA for all parts in contact with the liquid. It has no leaching of impurities and is designed for low temperatures, ensuring a long lifespan. Additionally, it is compact, making installation easy. 【Features】 ■ Compatible with hydrofluoric acid water ■ Maximum operating pressure is 0.4 MPa ■ Maximum operating temperature is 150℃ ■ Equipped with heater protection function ■ Remote control is possible *For more details, please download the PDF or feel free to contact us.

• Other heaters