Inline use for semiconductor chemical cleaning equipment! Chemical heating heater made of fluororesin.
"EXS" is an inline liquid heating heater for semiconductor chemical cleaning equipment. All wetted parts are made of PFA, designed with low watt density for long life. It can be used with ultra-pure water, alkaline solutions, and acidic solutions. Additionally, it is compact, making installation easy, and can be installed vertically or horizontally. 【Features】 ■ All wetted parts are made of PFA ■ Designed with low watt density for long life ■ Usable with ultra-pure water, alkaline solutions, and acidic solutions ■ Compact design for easy installation ■ Can be installed vertically or horizontally *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■EXS20 ■EXS40 ■EXS60 ■EXS80 *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ For inline use in semiconductor chemical cleaning equipment *For more details, please refer to the PDF document or feel free to contact us.
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Since our establishment in 1995, we have been engaged in the manufacturing of products that utilize the excellent properties of fluororesin as a comprehensive engineering solution. We can design and manufacture not only standard and mass-produced items but also products tailored to meet our customers' needs. By combining our strengths in skilled craftsmanship and machinery, we provide even higher quality products.