Strong against fluid fluctuations and shocks! Inline liquid heating heater for semiconductor chemical cleaning equipment.
The "ECN" is an inline chemical heating heater for semiconductor chemical cleaning equipment that uses PFA for all wetted parts. It is equipped with a built-in heater overheat alarm sensor and a liquid leak sensor, ensuring that the temperature rise during sudden shutdowns, such as power outages, is around 10°C, and it is resistant to flow fluctuations and shocks. Additionally, its compact design allows for easy installation, and the electrical control can effectively utilize existing setups. 【Features】 ■ All wetted parts are made of PFA ■ Low-temperature heater specification prevents chemical degradation ■ Built-in heater overheat alarm sensor and liquid leak sensor ■ Resistant to flow fluctuations and shocks ■ Easy installation due to compact design *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■ECN-30P ■ECN-45P ■ECN-60P ■ECN-90P ■ECN-120P ■ECN-240P *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■ For inline use in semiconductor chemical cleaning equipment *For more details, please refer to the PDF document or feel free to contact us.*
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Since our establishment in 1995, we have been engaged in the manufacturing of products that utilize the excellent properties of fluororesin as a comprehensive engineering solution. We can design and manufacture not only standard and mass-produced items but also products tailored to meet our customers' needs. By combining our strengths in skilled craftsmanship and machinery, we provide even higher quality products.
