ティー・ケイ・エス List of News Articles

On the morning of July 28, 2025, a communication failure occurred, causing difficulties in connecting phone calls. However, all systems have now been restored. The cause was a malfunction in the network equipment, and as of July 30 at 3:55 PM, both phone and network services are operating normally. We sincerely apologize for the significant inconvenience and trouble caused over an extended period.

We have updated the page for the Remote Plasma Ion Beam Sputtering System manufactured by PlasmaQuest, which has received positive feedback from various companies since its introduction. We have also included a video on Remote Plasma Target Bias Sputtering. If you have any questions or requests, please feel free to contact us.

The MEMS Engineer Forum is a unique forum operated primarily by engineers among the key players in MEMS technology, which is considered a key technology of the 21st century. At this forum, where MEMS researchers, developers, and engineers from around the world gather, we will introduce and showcase the Remote Plasma Ion Beam Sputtering System manufactured by Plasma Quest Ltd. This is an excellent opportunity to see cutting-edge technologies related to MEMS, not only from our exhibition but from others as well. We sincerely invite you to attend.

Introducing the PureSteel belt - a seamless metal belt - manufactured by Belt Technologies. The seamless metal belt demonstrates its true value in environments with high hygiene requirements, such as sterile pharmaceutical manufacturing facilities and large-scale food production facilities. This groundbreaking belt system has a proven track record in conveying applications within semiconductor manufacturing plants. In semiconductor manufacturing facilities, ultra-high cleanliness is essential in all operational environments, and processes such as high-temperature, vacuum, and chemical cleaning are routinely performed. The seamless PureSteel metal belt continues to be the choice for conveying in such harsh and demanding environments. With its dust-free conveyance, ease of cleaning, and resistance to various sterilization agents, this belt conveyor system is not only suitable for semiconductor manufacturing facilities but also strengthens our proposals to sterile pharmaceutical manufacturing facilities, sterile medical device manufacturing facilities, and food production facilities that require compliance with advanced regulations such as PIC/S GMP Annex 1 and HACCP.

We have updated the page for the Remote Plasma Ion Beam Sputtering System manufactured by PlasmaQuest, which has received positive feedback from various companies since its introduction. In particular, we have included information about the "control capabilities of reactive sputtering," which has garnered many inquiries from our customers. If you have any questions or requests, please feel free to contact us.

Research on Co-sputtering of different materials, such as ferromagnetic targets and metal and ceramic targets, which are considered difficult to film using conventional sputtering devices. We strongly support advanced material research and process development, including the deposition of AlScN, which is attracting attention for next-generation MEMS applications. This is a groundbreaking technology that uses a helicon ion source as a plasma source, accelerating high-density ions obtained from it by applying a bias voltage to the target. Since it is an ion beam-type deposition method using a remote plasma system, stable film formation can be achieved even with ferromagnetic and dielectric targets, which are challenging for magnetron sputtering devices. By individually controlling the ion source and target application, it is possible to accommodate a wide range of deposition conditions while also achieving high deposition rates. Independent gas supply near the target and substrate allows for the deposition of various multilayer thin films, including oxide and nitride films. Since the substrate surface is not exposed to plasma, it is possible to maintain a low temperature during film formation.

-Extension of Life Support- We aim to extend the life of devices whose manufacturer support period has ended. By using current products for the repair and regeneration of worn, degraded, or failed modules, we contribute to the stable operation of the equipment. -Reliability Recovery with Current Parts- We provide life extension not only through repair by replacing worn parts within servo motors but also through compatible modules using current motors and drivers. We will manufacture mounting parts, jigs, connectors, couplers, etc., for the equipment using currently produced motors and drivers, preparing them as "compatible actuator modules." By also preparing conversion connectors for the drivers, we will ensure they are ready as compatible modules. -Maintaining Reliability Without Modifying the Equipment (Non-Invasive)- In the life extension using current parts, each actuator will be configured as a compatible module. The replacement with new modules can be completed with "bolt-on" or "coupler-on" methods, allowing for life extension while maintaining the reliability of the equipment without any modifications to the operating device. (*) (*) Additional processing may be required when installing the module. Please feel free to consult us regarding devices for which we have no prior experience.

The MEMS Engineer Forum is a unique forum operated primarily by engineers among the key players in MEMS technology, which is considered a key technology of the 21st century. At this forum, where MEMS researchers, developers, and engineers from around the world gather, we will introduce and showcase the Remote Plasma Ion Beam Sputtering System manufactured by Plasma Quest Ltd. This is an excellent opportunity to see cutting-edge technologies related to MEMS, not only from our exhibition but also from others. We cordially invite you to attend. Venue: International Fashion Center Hall 1-6-1 Yokogawa, Sumida-ku, Tokyo 130-0015, Japan Access: https://www.tokyo-kfc.co.jp/access/ Exhibited Product: Remote Plasma Ion Beam Sputtering System by Plasma Quest Ltd. https://mono.ipros.com/product/detail/2001148974 https://www.plasmaquest.com/