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  1. Home
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  3. ティー・ケイ・エス
  4. We will exhibit at the MEMS Engineer Forum 2025.
OTHER
  • Apr 09, 2025
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Apr 09, 2025

We will exhibit at the MEMS Engineer Forum 2025.

ティー・ケイ・エス ティー・ケイ・エス
The MEMS Engineer Forum is a unique forum operated primarily by engineers among the key players in MEMS technology, which is considered a key technology of the 21st century. At this forum, where MEMS researchers, developers, and engineers from around the world gather, we will introduce and showcase the Remote Plasma Ion Beam Sputtering System manufactured by Plasma Quest Ltd. This is an excellent opportunity to see cutting-edge technologies related to MEMS, not only from our exhibition but also from others. We cordially invite you to attend. Venue: International Fashion Center Hall 1-6-1 Yokogawa, Sumida-ku, Tokyo 130-0015, Japan Access: https://www.tokyo-kfc.co.jp/access/ Exhibited Product: Remote Plasma Ion Beam Sputtering System by Plasma Quest Ltd. https://mono.ipros.com/product/detail/2001148974 https://www.plasmaquest.com/
MEF 2025 Official
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MEMS Engineer Forum 2025

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Plasma Quest Limited Company Introduction

Remote source ion beam sputtering device manufacturer for remote plasma sources.

PlasmaQuest is a reputable company with a 25-year history in the development and sales of helicon-type high-density ion sources and related application products. The gridless helicon plasma source generates high-density plasma and continues to provide OEM supply to many equipment manufacturers. Utilizing this high-quality plasma source as an ion source, the groundbreaking "HiTUS" system applies bias to the target, enabling sputtering under various conditions and with different targets. It allows for sputtering of high magnetic targets and high dielectric targets, which are considered difficult with conventional magnetron sputtering devices, as well as co-sputtering using heterogeneous targets such as metals and ceramics, making it suitable for a wide range of applications. The company is equipped to flexibly respond to both research applications and production-scale equipment.

  • Sputtering Equipment

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Remote plasma ion beam sputtering device

We achieve film formation by freely controlling reactive sputtering and alloy sputtering.

Independent current control is performed for the ion source, target, and substrate. With independent control, not only the sputter rate but also various reactive sputtering processes such as oxide and nitride films can be freely controlled. This device strongly supports advanced material research and process development, enabling the deposition of difficult-to-deposit materials such as ferromagnetic films, Co-sputtering of metal and ceramic targets, and dielectric/insulating films from metal targets. Independent control of ion supply and sputter rate → Control of sputter rate, film quality, and crystal structure → Control of ionization rate of target materials High-directionality film deposition → High-directionality film deposition characteristic of ion beam sputtering Multi-target mechanism → Wide-ranging multilayer film deposition Independent control of multiple targets → Co-sputtering alloy deposition by controlling the sputter rate of each target → Multilayer deposition by switching targets Conformal film deposition through bias application control to the substrate → Conformal film deposition even under adverse conditions such as deep trenches and overhangs.

  • Sputtering Equipment
  • Plasma Generator
  • Other surface treatment equipment

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High Rate Ion Beam Sputtering High-Speed Film Deposition System (HR-PVD)

High-rate and high-quality film formation of dielectric and ferromagnetic materials.

This is a high-speed ion beam sputtering (IBD) device that excels in the deposition of dielectrics such as Al2O3 and SiO2, which typically have low deposition rates in conventional magnetron sputtering, as well as ferromagnetic materials like Fe. By using a helicon plasma source as the ion source and a groundbreaking method that accelerates the high-density ions obtained from it through the application of bias voltage to the target, it achieves high-rate and highly directional film deposition. It also contributes to cost reduction in deposition processes using valuable and rare targets by efficiently utilizing the entire target surface. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieving both high-speed sputtering and low contamination Reduction of running costs through improved target utilization efficiency Maintenance reduction due to gridless structure Sputtering while keeping the substrate at low temperature through remote plasma configuration ■ Wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality Uniform film thickness can be achieved with a highly directional ion beam, resulting in excellent step coverage in film deposition.

  • Sputtering Equipment

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Related catalog(3)

Remote Plasma Ion Beam Sputtering "PlasmaQuest HiTUS"

Remote Plasma Ion Beam Sputtering "PlasmaQuest HiTUS"

PRODUCT
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Remote Plasma Deposition Equipment HiTUS System

Remote Plasma Deposition Equipment HiTUS System

TECHNICAL
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  • Catalog download

Contact this catalog

High Rate Ion Beam Deposition System HR-PVD

High Rate Ion Beam Deposition System HR-PVD

PRODUCT
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ティー・ケイ・エス
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Hyper CLT flooring panel

NETIS Registration Environmentally Considerate Civil Engineering CLT | Hyper CLT Paving Slab

  • NEW
  • PRODUCT

In civil engineering sites, in addition to construction feasibility and safety, material selection that takes environmental considerations into account is required. Materials used for temporary roads, access roads, heavy machinery work yards, and material storage areas are now focusing not only on traditional steel plates but also on materials that can contribute to reducing environmental impact. Hyper CLT sheets are civil engineering CLT materials made from wooden CLT. Because they utilize wood, they are characterized by their ability to easily connect to proposals that consider site environments, such as CO2 fixation, glare reduction, and noise reduction. The 5×10 sheet weighs about 230 kg, and the 5×20 sheet weighs about 460 kg, making them lightweight and easy to handle even with small machinery, thus helping to reduce the burden of transportation, installation, and removal. Furthermore, they can be used in a wide range of applications as an alternative to steel plates for measures against muddy conditions, ground protection, and ensuring work pathways. In public works, they are also easy to propose as materials that demonstrate the adoption of environmentally friendly materials and ingenuity during construction, which can lead to improved site evaluations. As a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS "TH-250021-A," they can also be utilized as materials for proposals on creativity and environmental measures in public works. We recommend them as a new alternative to steel plates for companies considering environmental considerations, NETIS, civil engineering utilization, and civil engineering CLT. Please feel free to consult us.

Jul 05, 2026

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Thank you for visiting the [Mechanical Components Technology Exhibition] and notice of free technical consultations and prototype acceptance for "release agents, sliding, and corrosion prevention."

  • NEW
  • COMPANY

Hello everyone! We are Nikken Coating Industry Co., Ltd., a specialized manufacturer of contract processing for fluororesin coatings and PEEK coatings. Thank you very much for visiting our booth at the recent "Mechanical Elements Technology Exhibition." Thanks to you, we were able to conclude the event successfully. At the exhibition, we proposed surface treatment solutions for the "five challenges (release, sliding, corrosion resistance, impurity measures, and environmental response)" that arise in manufacturing sites. Were there any technologies that caught your interest? ■ We are currently responding to inquiries made at the venue We are sequentially contacting those who made technical inquiries or requests for prototypes at our booth on the day of the event. If you have requests such as "I would like you to look at additional drawings" or "I need a quote urgently," please feel free to let us know. ■ For those who could not attend the exhibition or missed our booth We also welcome inquiries from customers who could not come to the venue, such as "coating for special shapes that other companies have declined" or "switching from existing coatings." If you have any concerns regarding "surfaces," please feel free to consult or contact us.

Jul 04, 2026

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Dust from wood processing with a drill press.

Maintenance Resilience 2026: We will exhibit a fine particle visualization system at the 52nd Plant Maintenance Show. (July 15 (Wed) - July 17 (Fri), 2026 / Tokyo Big Sight, East Hall 1, 1-H12)

  • NEW
  • OTHER

The particle visualization technology developed under our brand "ViEST" has a very high level of detection sensitivity that allows for real-time visualization of the suspended and adhered states of micro and nano-sized particles. We are engaged in the sale of visualization systems and contract services for evaluation (investigating particles and airflow in production processes, manufacturing equipment, and factory environments, evaluating the performance of cleaning products, proposing yield improvement measures, etc.) both domestically and internationally. In manufacturing environments, invisible fine foreign substances, dust generation, particle adhesion due to static electricity, and airflow disturbances can lead to quality defects and reduced yield. Our company clarifies these contamination factors through visualization technology and provides consistent support from identifying the source of the problem to considering and confirming improvement measures. Do you have any of the following concerns? - Unable to identify the cause of foreign matter contamination - Want to check airflow and cleanliness in clean rooms - Want to understand dust generation from manufacturing equipment and transport systems - Want to reduce particle adhesion to films and substrates - Want to improve contamination that causes yield reduction

Jul 04, 2026

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Metal Crack Repair: MS Method for Repairing Cracks and Fractures in Machinery Equipment

  • NEW
  • CATALOG

Metal cracks are one of the concerns in equipment maintenance operations. Conventional welding repair methods can alter the base material around the crack due to heat, leading to residual stress and deformation, which always carries the risk of "crack recurrence" or "secondary damage." Hinode Water Supply Equipment Co., Ltd.'s "Mechanical Stitching Method" is a new technique that allows for metal crack repair without applying heat. By using special bolts and reinforcement plates, the crack is physically removed without affecting the base material with heat. Repairs can be made even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. For more details, please contact us or download the catalog.

Jul 04, 2026

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Metal Crack Repair: MS Method for Repairing Cracks and Fractures in Machinery Equipment

  • NEW
  • PRODUCT

Metal cracks are one of the concerns in equipment maintenance operations. Conventional welding repair methods can alter the base material around the crack due to heat, leading to residual stress and deformation, which always carries the risk of "crack recurrence" or "secondary damage." Hinode Water Supply Equipment Co., Ltd.'s "Mechanical Stitching Method" is a new technique that allows for metal crack repair without the application of heat. By using special bolts and reinforcement plates, the crack is physically removed without affecting the base material at all. Repairs can be made even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. For more details, please contact us or download the catalog.

Jul 04, 2026

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