メガトール Product Lineup

Throttle (butterfly) valve for vacuum pressure control with a variable valve body from 0 to 90° 【Features】 ○ By using in conjunction with the ACX controller, high-speed response and high reproducibility of vacuum pressure control can be achieved in processes such as semiconductor manufacturing. ○ Various types and sizes of flanges are available. ○ Custom manufacturing inquiries are also welcome. ○ Maximum differential pressure: 1 atmosphere ○ Fully closed mode: 1/10000 F.S. conductance ○ Motor: 2-phase stepping motor ○ Gas contact materials: SUS, Teflon, Ni, etc. ● For other functions and details, please contact us.

• valve

Heaters are implemented in the flange and the valve body itself. It is possible to heat the valve and valve body to the set temperature, eliminating temperature gradients and preventing the adhesion of impurities, making it a throttle valve. 【Features】 ○ High-speed response and high reproducibility of vacuum pressure control ○ Safe design ○ Ideal for use with low vapor pressure materials during processing ○ Custom products can be manufactured according to specifications ○ Bore size: 3 inches OD ○ Valve body & valve material: SUS316L ○ Heater Valve body: 400W / Valve: 60W ○ Maximum operating temperature: 150°C (Max 180°C also available) ● For other functions and details, please contact us.

• valve

Capacitance manometer capable of measuring the pressure inside a vacuum chamber as absolute pressure. 【Features】 ○ Capable of measuring vacuum pressure as absolute pressure ○ Gas contact parts made of Inconel, excellent corrosion resistance ○ Total pressure can be measured regardless of gas type ○ Adoption of a unique sensor structure significantly improves zero stability, reliability, and accuracy ○ Excellent long-term reproducibility ○ 2-year warranty ○ Available in general-purpose and self-heating types ○ Digital communication possible via Device Net and RS485 ● For other functions and details, please download the catalog.

• Other measurement, recording and measuring instruments

High-quality and high-precision quartz products manufactured in an ISO9002 certified factory 【Features】 ○ Reliability in quality and delivery ○ Over 20 years of experience in quartz manufacturing ○ Manufactured in an ISO9002 certified factory ○ Production and packaging in a clean room ○ Capable of producing products related to 300mm ○ Highly skilled technicians ○ Use of proprietary jig design for high precision 【Products Offered】 ○ Process Tube ○ Boats (Ring Boat) ○ Pedestals Table ○ Bath ○ Etcher Parts ● For other functions and details, please contact us.

• others

The "AP-100R Series" is used as a downstream pressure control device to control the vacuum pumping speed by changing the valve conductance when evacuating the vacuum chamber in manufacturing equipment. It allows for the connection of two capacitance manometers for independent pressure monitoring and control. It can output an in-control status signal and a controller abnormal alarm output. 【Features】 ■ Independent pressure monitoring and control is possible ■ Soft start for valves (slow vacuum) ■ Lamp control (delay control) is possible ■ Output of in-control status signal ■ Output of controller abnormal alarm ■ Pressure monitoring and control can be performed with two capacitance manometers of different ranges connected *For more details, please refer to the PDF document or feel free to contact us.

• Other FA equipment

High-temperature heating type also available Capacitance manometer compatible with Device Net 【Features】 ○ Unique sensor structure (MicroLis Mark?W sensor) ○ Protects the diaphragm from contamination ○ Reduces the impact of external temperature changes on output values ○ Dual-zone temperature control By dividing the heater into two parts and digitally controlling each, uniformity and responsiveness are improved ○ Digital circuit configuration Supports digital communication via Device Net and RS485 Eliminates potentiometers, reducing the number of analog components, thereby decreasing aging changes and improving reliability ○ Improved maintainability through GUI software diagnostic functions ● For other functions and details, please contact us.

• Other measurement, recording and measuring instruments

A general-purpose capacitance manometer capable of measuring the pressure inside a vacuum chamber as absolute pressure. 【Features】 ○ Capable of measuring vacuum pressure as absolute pressure ○ Gas contact parts are made of Inconel, offering excellent corrosion resistance ○ Total pressure can be measured regardless of gas type ○ Adoption of a unique sensor structure significantly improves zero stability, reliability, and accuracy ○ Excellent long-term reproducibility ○ 2-year warranty ○ Digital communication possible via Device Net and RS485 ● For other functions and details, please contact us.

• Other measurement, recording and measuring instruments