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  6. Pressure Controller "AP-100R Series"

Pressure Controller "AP-100R Series"

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last updated:Dec 20, 2018

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Independent pressure monitor and control capable downstream pressure control device.

The "AP-100R Series" is used as a downstream pressure control device to control the vacuum pumping speed by changing the valve conductance when evacuating the vacuum chamber in manufacturing equipment. It allows for the connection of two capacitance manometers for independent pressure monitoring and control. It can output an in-control status signal and a controller abnormal alarm output. 【Features】 ■ Independent pressure monitoring and control is possible ■ Soft start for valves (slow vacuum) ■ Lamp control (delay control) is possible ■ Output of in-control status signal ■ Output of controller abnormal alarm ■ Pressure monitoring and control can be performed with two capacitance manometers of different ranges connected *For more details, please refer to the PDF document or feel free to contact us.

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Pressure Controller "AP-100R Series"

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  • Related Link - http://megatorr.co.jp/kind/valve/page/2/

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【Specifications (Excerpt)】 ■ Main unit dimensions: Height 82mm, Width 199mm, Depth 275mm (excluding protrusions) ■ Front panel: Height 88mm, Width 241mm ■ Weight: 2.9kg ■ Operating environment temperature: 0℃ to 50℃ (provided there is no condensation and not installed in a sealed space) ■ Power supply voltage: AC100-220V ±10% 50/60Hz ■ Power consumption: Maximum power consumption Max. 100Watt *For more details, please refer to the PDF document or feel free to contact us.

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Pressure Controller "AP-100R Series"

Pressure Controller "AP-100R Series"

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Testing, Analysis and Measurement

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Megatoll Corporation delivers reliable trust in the fields of semiconductor equipment, analytical instruments, and vacuum technology.

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