Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.
The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2.
It reduces dead volume with a diaphragm seat valve.
The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM.
【Features】
■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc.
■ Maximum flow rate: Gases from 1 SCCM to 20 SLM
■ Accuracy: ±1% F.S.
■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2)
*For more details, please refer to the PDF document or feel free to contact us.