10nm Feedback Stage Controller FC-514
Positioning with 10nm resolution. Equipped with slowdown function.
It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-514 is compatible with slow-down sensor signals and ORG sensor signals. The 10nm feedback stage is equipped with a slow-down sensor on the long-scale type stage, enabling high-speed positioning of long strokes with high resolution, which can expand the range of measurement data. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
- Company:シグマ光機
- Price:500,000 yen-1 million yen