アトーテック　 List of Products and Services

At AtoTech, we offer renewal advice for vacuum equipment that has been in use for over 20 years. Issues such as "the achieved vacuum level is not increasing," "the evacuation time is long," and "uniform heating is not achieved" can be improved by replacing or overhauling the vacuum pump. We also perform overhauls of vacuum equipment and helium gas leak tests and checks. Please consult us by phone about the condition of your equipment. 【For these kinds of problems】 ■ The achieved vacuum level is not increasing ■ The evacuation time is long ■ Uniform heating is not achieved *For more details, please refer to the related links or feel free to contact us.

• Vacuum Equipment

The "Ultrafine Particle and Nanoparticle Manufacturing Device" is a product that utilizes forced evaporation phenomena to increase the generation rate and quantity of ultrafine particles, allowing for more efficient repair. The generation and collection sections of the ultrafine particles are connected in a closed system via pipes, and the gas used for forced evaporation circulates until the work is completed, making it environmentally friendly and economical. This leads to significant cost reductions. 【Features】 ■ Equipped with a gas filtration circulation system ■ Reduces power costs for material evaporation through forced evaporation phenomena ■ Compatible with various raw material shapes (lumps, sheets, wires, granules, etc.) ■ The used gas (hydrogen/argon) is economical due to its circulation system ■ Enables the production of clean nanoparticles due to its dry process, etc. *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Vacuum Equipment
• Fine grinding machine
• Crusher

This device is a multipurpose experimental furnace that allows for uniform heating of various shapes of target samples using a heater in a vacuum and inert gas atmosphere, as well as pressure treatment up to 5 tons using a hydraulic press. 【Specifications】 - Heating temperature: Normal use 600℃ - Heater: Molybdenum resistor - Effective dimensions: 150 diameter × 170 length - Uniform heating section: 130 diameter × 100 length ±10℃ (in non-pressurized VaC) - Temperature control: Digital programmable PID method - Recorder: 6-point, 100 mm width - Pressurization force: Total pressure 0.4 to 2 tons - Mini cylinder switching: (0.035 to 0.2 tons) - Pressurization stroke: 40 mm - Achievable pressure: ×10^-6 Torr (in vacuum, at room temperature) - Exhaust system: Oil diffusion pump DPF-3 inch, oil rotary pump 200 L/min - Vacuum gauge: Pirani, ion vacuum gauge, compound gauge - Utility: Electric AC 200V, 3-phase 9KVA 50HZ - Cooling water: 10 L/min or more, 2 kgf/cm²G, below 25℃ - Inert gas: High purity gas (99.99% or more) *For more details, please download the PDF or contact us.

• Electric furnace
• Heating device
• Cooling system

【Specifications】 Max Temp: 2000℃ Uniform heating zone: 20φ × 50H Achievable pressure: 5×10^-6 Pa TMP: 1300 L/s, 280 L/s RP: 650 L/min, 140 L/min MB: 50 m³/hr Equipped with gas quenching mechanism

• Electric furnace
• Heating device
• Cooling system

Specifications Max Temp: 2000℃ Uniform heating zone: 50 diameter × 150 height Achievable pressure: 5×10^-6 Pa TMP: 1800 L/s, 60 L/s RP: 500 L/min, 90 L/min Equipped with gas quenching mechanism *For details, please contact us.*

• Electric furnace
• Heating device
• Cooling system

【Features】 This is a furnace for vacuum heat treatment, such as filling electrodes of halogen lamps and degassing. A turbo molecular pump is used for the exhaust system due to the high vacuum. 【Specifications】 Achievable pressure: 5X10-6Pa Operating pressure: X10-4Pa Maximum heating temperature: 2400℃ Operating heating temperature: 2000℃ High-frequency power supply: 40KW Uniform heating zone: 30 diameter x 30 height (2000℃±2%)

• Hydraulic Equipment
• Electric furnace

Specifications Temperature: Normal use 2200℃, maximum 2300℃, maximum in vacuum 2200℃ Heating time: Room temperature to 2200℃ in 60 minutes Vacuum level: Achieves 5×10^-5 Torr Sample case: Sintering φ150×φ130×120H Mold: Hot press φ60×120H, isotropic graphite Pressure: Atmospheric pressure 9.5 kg/cm², total hot press pressure 10 TON Temperature control: Thermocouple, monochrome temperature detection digital, program PID control Recording: 3-PEN recorder (temperature, press pressure, sample thickness displacement) Heating: Graphite resistance heating element, 40KW Cooling water: 50L/min, 2-4 KG/cm², below 32℃

• Hydraulic Equipment
• Electric furnace
• Heating device

【Specifications】 Vacuum chamber 600W×200D×650H Achievable pressure 8×10-3Pa Wire diameter 0.5mm to 0.9mm × 5m Wire feed speed 0.01m to 1.5m/sec Heating method Direct electric heating Max Temp 2000℃ Rapid cooling method to Ga gas

• Hydraulic Equipment
• Electric furnace
• Heating device

Specifications Single-stage furnace max Temp 1000℃ (transparent electric furnace) Type A Double-stage furnace max Temp 1200℃ uniform heating area 40×80 (infrared gold image furnace) Achievable pressure ×10-5Pa TMP 160L/sec RP 162L/min Temperature controller, recorder, Pirani gauge, ionization vacuum gauge

• Hydraulic Equipment
• Electric furnace
• Heating device

【Overview】 This device has been developed for the purpose of conducting heat treatment tests on metallic materials in a vacuum and at high temperatures (up to 1100°C) in a strong magnetic field (20T) using a superconducting magnet. The electric furnace features a structure that is not affected by the strong magnetic field. 【Product Specifications】 1. Maximum heating temperature: max 1100°C, 10φ×30L 2. Electric furnace outer cylinder (SUS304) 1) OD 95φ×312L, water-cooled inner cylinder, vacuum insulation layer 2) Upper super-stroke bellows, vacuum chamber (with electrodes and feedthrough) 3) Lower sample exchange ICF flange 3. Heater (Ta) with inductive winding 21φ×94L 4. Reflector (Ta, Mo) 24φ×31φ×98φ 5. Frame (SUS304) 1330W×1460D×1820H

• Other heaters
• Heating device
• others

【Specifications】 Pressurization method: Weight method using weights and leverage Overheating dimensions: 40 diameter x 40 height Overheating method: High frequency, programmable temperature control Maximum overheating temperature: 1400℃ Vacuum level: x10-5 PA High frequency power supply: 20KW

• Mixer/agitator
• Granulating Equipment

【Purpose】 Used for diffusion bonding of various metals up to 30 mm in diameter. 【Specifications】 Pressurization capacity: 1 Torr Operating pressure: 10^-4 Pa Operating heating temperature: 1300°C Heating length: 30 mm x 100 mm High-frequency power supply: 20 KW

• Electric furnace
• Mixer/agitator

This device is designed to produce various metal materials through arc melting in an argon gas atmosphere (under reduced pressure). 【Features】 ■ Economy type suitable for development and research ■ Compact and low-cost ■ Easily melts master alloys and other materials 【Applications】 Magnetic materials, thermoelectric materials, battery materials, biomaterials, micro-machines, recycling

• Electric furnace
• Other processing machines

【Specifications】 Dissolution amount: 500g equivalent to Fe Dissolution chamber: SUS304 200×200H Copper hearth: Various shapes such as buttons, rods, etc. Vacuum exhaust system: DS-312Z (manufactured by Daya Vacuum) Oil diffusion pump: DPF-3Z (360L/sec) Oil rotary pump: (150L/min) Oil mist trap: G-340 Vacuum gauge: IT-L20P (manufactured by Daya Vacuum) Achievable pressure: ×10-6 Torr Arc power supply: Input 3φ 23KVA, current 500A Electrical capacity: 3200V 25KVA, 100V 1KVA Cooling water: 20L/min Water pressure: 1kg/cm2 or more

• Electric furnace
• Other processing machines

By pulling down the plunger, molten Zr-based metal can be instantly injected into the mold on the copper hearth, allowing for the creation of bulk amorphous alloys. Round bars of 16mm diameter × 80mm length and plates of 5mm thickness × 18mm width × 100mm length can be produced by changing the mold. Additionally, this device has the capability to create not only bulk amorphous alloys but also multi-metal buttons and master alloys by exchanging molds, offering good operability and efficient sample production.

• Hydraulic Equipment
• Electric furnace
• Other processing machines

[Summary] This device directly heats Nb/AL composite wires with a diameter of φ1.0 to 1.6m and a length of over 2Km in a vacuum chamber using electric current (2000℃), and then rapidly cools them in molten Ga at temperatures between 50℃ and 150℃, resulting in the uniform production of long bcc phase saturated solid-liquid wires. Therefore, it can also be applied to other purposes such as quenching long wires. *For more details, please contact us.

• Heating device
• Granulating Equipment

◆Overview◆ This device has been developed for the purpose of conducting tensile and compression tests on metallic materials in a strong magnetic field (20T) in combination with a heat treatment device in the magnetic field. 【Additional Equipment】 Existing heat treatment device in a magnetic field Actuator (with load cell) High-pressure hydraulic hose Hydraulic source Control device 【Specifications】 1. Actuator 1 ton (with load cell) 2. Stroke ±25 3. Low-speed tensile rate 0.015 mm/min 4. Tensile cycle testing possible 5. Compression cycle testing possible

• Testing Equipment and Devices
• Other measurement, recording and measuring instruments

【Specifications】 Internal dimensions: 300 diameter × 400 height (SS-400) Heating temperature: max 150℃ Heater capacity: 200V 3-phase 4KVA Vacuum pump: 500L/min With program timer Options: Impregnation case, product mesh plate *For details, please contact us.

• Other physicochemical equipment
• Other laboratory equipment and containers

【Specifications】 - High voltage can be easily applied to heated silicon substrates and glass substrates for bonding. - Compact and economical type suitable for research and development. - The alignment section is a small tabletop design. - Standard sample size is 4 inches, with an option for up to 6 inches. Applications - Various sensors, micromachines, biomaterials, and various optical applications.

• Hydraulic Equipment
• Granulating Equipment
• Other semiconductor manufacturing equipment

【Features】 Since the printing plate and other components are vacuumed before entering the ink, the ink absorption is extremely good. 【Specifications】 Container: 330×520H (made of acrylic) Ink can: 180 diameter × 180H Wire mesh container (for holding printing plates, etc.): 170 diameter × 100H Vacuum: ×10-1Pa Vacuum pump: 50/min Vacuum valve, sample up and down rod (with vacuum sealing mouth) *For more details, please contact us.

• Printing Machinery
• Other physicochemical equipment

【Features】 1) It can be rapidly heated from room temperature to 1000°C in about 11 minutes. 2) Rapid cooling of samples is possible by introducing inert gas. 3) The uniform temperature zone is φ50×300L within ±1°C at 1000°C. 【Specifications】 Max Temp: 1000°C Uniform temperature zone: φ50×300L + movable 1000L Achievable pressure: 3×10^-5 Pa (when using DC-705 oil and trap) Transparent electric furnace: Type A Power supply: 1-phase 200V 3KW Vacuum exhaust system: (DS-412Z type) (manufactured by Daitsu Vacuum) Ionization vacuum gauge: (IT-L20P type) (manufactured by Daitsu Vacuum) *For more details, please contact us.

• Electric furnace
• Granulating Equipment

【Specifications】 Max Temp: 1000℃ Uniform heating zone: 50 mm diameter × 300 L, within 1℃ at 1000℃ Achievable pressure: 3×10^-4 Pa Transparent electric furnace: Type A Power supply: 1 phase, 200V, 3KW Vacuum exhaust system: (DS-312Z type) (Daiwa Vacuum Co.) Ionization vacuum gauge: (IT-L20P type) (Daiwa Vacuum Co.) Recorder (Shimaden Co.) *For more details, please contact us.

• Hydraulic Equipment
• Electric furnace

【Specifications】 Heating temperature: up to 1200℃ Uniform heating zone: 60 pipe × 150L, 1000℃ ±5℃ Heater: Kanthal heater *For more details, please contact us.

• Other heaters
• Electric furnace

Specifications Heating temperature: up to 1150°C Uniform heating zone: 150φ × 150L, 1000°C ± 5°C Heater: Kanthal heater *For details, please contact us.

• Other heaters
• Electric furnace

【Specifications】 Heating temperature: Normal 800℃, Maximum 1000℃ Heat distribution zone: 90 diameter × 500L, 500 to 1000℃, within ±2℃ Heater: Kanthal heater Programmable controller Temperature recorder Electric furnace: 110 diameter × 1000L (3-zone control), 200V 1 phase 7KW per unit

• Other heaters
• Electric furnace

【Specifications】 Maximum heating temperature: 1600℃, normal use 1500℃ Heat uniformity zone: 30 pipe × 300L, 1200℃ ±7℃ Heater: Kanthal Super, three-zone control method Electric furnace: 350 × 700L, inner diameter φ32 Electrical capacity: Primary side 200V1, wire 50A, secondary side max 20V, 120A × 3 Recorder: 1 PEN Temperature controller: 3 units *For more details, please contact us.

• Other heaters
• Electric furnace

【Specifications】 Upper furnace (in atmosphere) Three-part heater (three circuits) Kanthal furnace, 2 units Heat uniformity zone φ50×200L 1000℃±2℃ Max Temp 1200℃ Furnace core tube Alumina tube 60φ×55φ×1000L Lower furnace (in vacuum) Vac ×10-4Pa Specifications are equivalent to the upper section, but with a sample entry/exit chamber (SUS) Furnace core tube support chamber 60φ seal port (2 locations) water-cooled Vacuum exhaust system (RP (160L/min), DP (DPF-3Z)) valves, etc. Transparent quartz tube 60φ×55φ×1000L

• Other heaters
• Electric furnace

Compact economy type suitable for research and development ■ Synthesis of metal-encapsulated fullerenes and carbon nanotubes is also possible ■ Equipped with a continuous work supply mechanism ■ Equipped with a cathode growth prevention mechanism ■ Compact design, easy to recover suits and install ■ Cleaning is simple and only requires one time ■ Optional: Arc orientation change using a magnetic field is possible *For details, please contact us.

• Granulating Equipment
• Gas Generator

Specifications Holder storage manifold: 6 units Achievable pressure: ×10^-8 Torr Exhaust system: Turbo molecular pump (200 L/sec, 50 Hz, N2) Rotary pump (165 L/min) Gate valve, auxiliary valve Ion vacuum gauge, Pirani vacuum gauge, gas introduction valve, with bending device

• Microscope
• Other laboratory equipment and containers
• Electron microscope

【Product Specifications】 Electrostatic Change Type Electron Gun Evaporation Source Electron Gun Capacity: 20W Filament Current: DC10A Emission Current: max 50mA Shroud Water Cooling: (2L/min) Deposition Material Dimensions: φ1mm × 50mm Z-Axis Movement Range: 6 inches Mounting Flange: ICF70 Shutter Mechanism: Manual Shutter Aperture: φ7 *For more details, please contact us.

• Microscope
• Other laboratory equipment and containers
• Electron microscope

【Features】 ■ Ideal for simple gas quantitative analysis ■ Easy operation with high reliability ■ Compact and economical ■ Patent pending *For more details, please contact us.

• Gas Generator
• Flow Meter
• Other laboratory equipment and containers

Vacuum gauge with added functions to meet diverse needs 【Features】 ○ Pirani Vacuum Gauge PT-3DA A low-temperature Pirani vacuum gauge that can accurately and easily measure a wide range of pressures, regardless of cable length. ○ Cold Cathode Vacuum Gauge CT-3DA A cold cathode ionization vacuum gauge that employs a reverse magnetron type sensor. ○ Ionization Vacuum Gauge IT-3DA A thermal cathode ionization vacuum gauge that utilizes the latest IT technology, allowing for multifunctional and high-precision measurements to meet various user needs. ○ Combination Vacuum Gauge PC-3DA A combination vacuum gauge that allows for simultaneous connection and measurement of a cold cathode ionization vacuum gauge (1 channel) and a Pirani vacuum gauge (2 channels). *For more details, please download the PDF or contact us.

• Vacuum Equipment

The GHP series, known for its excellent reliability, durability, and safety, demonstrates maximum performance across a wide range of fields. 【Features】 ○ Low noise and low vibration ○ Equipped with oil backflow prevention mechanism ○ Equipped with gas ballast valve ○ Compact and lightweight *For more details, please download the PDF or contact us.

• Vacuum pump

Environmentally friendly design for people and the Earth. DPA Series 【Features】 ○ Industry's first! Adoption of lead-free solder 　　Lead-free solder for fixing pipes for cooling water ○ 40% reduction in power consumption ○ 20% reduction in operating oil volume *For more details, please download the PDF or contact us.

• Vacuum pump

High-performance high vacuum exhaust device that can be easily connected to vacuum equipment 【Features】 ○ Usable with AC 100V. ○ Protects the oil rotary pump and oil diffusion pump with a safety circuit. ○ Exhausts to high vacuum regions using an oil diffusion pump and cold trap. ○ Available in air-cooled or water-cooled types. ○ Main valve flange can be made in an upward-facing configuration (optional). ○ Various vacuum gauges are available as options. ○ The DS-T series with turbo molecular pump specifications is also available. ○ The DS-612Z (water-cooled) can also be manufactured. *For more details, please download the PDF or contact us.

• Vacuum Equipment

Outstanding performance and high functionality condensed into cutting-edge technology. 【Features】 - Display resolution: 6 1/2 digits (approximately 2 digits improvement over conventional models) - High-speed data communication and automatic zero correction are standard features - Accuracy: 0.1% R - Volume is less than half of conventional models - Significantly improved noise resistance for pulse signal transmission *For more details, please download the PDF or contact us.

• Vacuum Equipment

Remove oxygen and moisture in a short time to create an optimal working environment. 【Features】 <Glove Box> ○ Compact & economical type ○ Compatible with vacuum type / gas replacement type ○ Supports multiple glove types / face-to-face operation type ○ Automatic pressure regulation function makes glove work easy <Gas Circulation Purification Device> ○ Compact & economical type ○ Capable of gas purification in a short time (moisture, oxygen) ○ Selection of precious metal catalyst and Ni catalyst is possible ○ Compatible with manufacturing equipment for continuous use (double column type) *For more details, please download the PDF or contact us.

• Vacuum Equipment

This is a confident work that combines technology and elegance. 【Features】 ○ The flange adopts the JIS B 2290 standard. ○ The main body material is made of stainless steel. ○ The O-ring material is made of fluororubber. ○ Achieves low cost with stainless steel. *For more details, please download the PDF or contact us.

• Vacuum Equipment

This is a lineup that meets your needs. 【Features】 ○ The flange adopts the JIS B 2290 standard. ○ The main body material is made of stainless steel. ○ The O-ring material is made of fluororubber. ○ Achieves low cost with stainless steel. *For more details, please download the PDF or contact us.

• Vacuum Equipment

Power display unit for multifunction transducers and Pirani vacuum gauge transducer. A lineup that meets your needs. 【Features】 ○ Wide range pressure measurement: Capable of measuring from atmospheric pressure to 5×10^-2 Pa. ○ Power supply voltage: Transducer TRP-10 operates with a DC power supply voltage of 12-30V, while power display unit TR-1DA can be used within the range of AC 100-240V. ○ Multi-channel: Capable of measuring three points. ○ Analog output: Three independent outputs. ○ Compact: Size DIN 96×96 mm. ○ Pressure signal: Outputs a DC 0-10V proportional to pressure, allowing for pressure conversion using a formula with log-linear output. Equipped with standard RS-485 digital communication, ideal for automation. ○ Transducer: Integrated with "sensor control circuit," allowing use without a power display unit, achieving low cost and space-saving. ○ Vacuum switch function: TRP-10SP is equipped with two set points and can be used as a vacuum switch (optional). *For more details, please download the PDF or contact us.

• Vacuum Equipment

It is capable of accurately measuring a wide range of atmospheric pressure up to 5×10^-2 Pa, achieving low cost and space-saving through the integration of the "sensor + control circuit." Additionally, it has enhanced communication functions to facilitate the automation of vacuum production equipment and simplify the operation of vacuum testing devices, making data collection easier. 【Features】 ○ Wide range pressure measurement: Capable of measuring from atmospheric pressure to 5×10^-2 Pa. ○ High precision: Significantly improved temperature compensation function through digital circuits, achieving high accuracy. ○ Lightweight and compact: Realized lightweight and compact design through digital circuits and a unique filament structure. ○ Pressure signal: Outputs a DC 0-10V signal proportional to pressure, allowing for pressure conversion via formulas with a log-linear output. Standard equipped with RS-485 digital communication, ideal for automation. ○ Power supply voltage: The transducer TRP-10 operates on a DC 12-30V power supply, while the power display unit TR-1DB can be used within an AC 100-240V range. ○ Transducer: The integration of the "sensor control circuit" allows for use without a power display unit, achieving low cost and space-saving. ○ Vacuum switch function: The TRP-10SP is equipped with two set points and can be used as a vacuum switch (optional).

• Vacuum Equipment

Combines the Pirani vacuum gauge and cold cathode vacuum gauge into one unit. Enables wide-range measurement. 【Features】 ○ Wide range measurement: 5×10^-7 to 5×10^5 Pa ○ Improved maintainability ○ For environments where timely display of measurement values is desired, easy monitoring can be achieved by connecting to the TR-2DB (sold separately). *For more details, please download the PDF or contact us.

• Vacuum Equipment

Using a water-cooled copper mold for melting in an inert gas (Ar.He) atmosphere allows for extremely good melting without oxidation or nitriding of the sample, and there is no contamination from the crucible. 【Features】 ○ It is one of the melting methods that is absolutely essential for metals that react with refractory crucibles. ○ The entire process from evacuation to melting is completed in just a few minutes, making it easy to operate even for those without experience. ○ Melting under reduced pressure above the stable arc region of 7×10^-3 Pa has a degassing effect. ○ The electrodes can be moved up, down, front, back, and sideways through a universal seal. Therefore, sufficient stirring of the sample can be achieved, resulting in a uniform alloy. ○ Ignition is easy with the arc starter, and there is almost no pickup with W electrodes. ○ By changing the mold, samples of any size and shape can be obtained. ○ The use of a water-cooled jacket type chamber ensures that the chamber does not get hot even during continuous melting, making it safe. *For more details, please download the PDF or contact us.

• Vacuum Equipment
• Electric furnace

Easily produced metal materials through arc melting in an argon gas atmosphere. 【Features】 ○ Compact and economical type suitable for research and development. ○ Easily achieves ultra-high temperatures, allowing for the melting and refining of parent alloys. ○ Easy to create sputtering target materials. *For more details, please download the PDF or contact us.

• Vacuum Equipment
• Electric furnace

High-density sintered bodies can be obtained in a short time through optimal settings of temperature and pressure. 【Features】 ○ The front door design allows for easy maintenance and inspection of samples, die settings, furnace materials, heaters, and chambers. ○ Heaters and insulation materials can be selected based on temperature, vacuum, inert gas, reduction, and oxidation atmospheres. Hot pressing under gas pressure (MAX 9.8 bar) can also be produced depending on the workpiece. ○ Normal pressing is single-sided (top press, bottom press), but double-sided pressing can also be manufactured. ○ Normal pressing is uniaxial, but twin and multi-axial types can also be produced. ○ By installing a cooling unit, processing time can be reduced (optional). ○ Pressure methods can be selected based on pressure accuracy, ranging from low to high pressure, using mechanical, pneumatic, or hydraulic systems. ○ Diffusion bonding is also possible due to extensive pressure control. ● For more details, please contact us or refer to the catalog.

• Vacuum Equipment
• Electric furnace