テクノポート List of Products and Services

This is a completely oil-free and contamination-free aluminum foil that can be used in clean rooms and vacuum chambers. The aluminum foil is wrapped around a plastic core and is covered with vinyl. The case is also made of plastic, so no paper materials are used at all. It can be safely used in clean rooms. Since it is completely clean aluminum foil, it can be used as a disposable substitute for protective plates in vacuum equipment, such as deposition devices. We offer four sizes in terms of thickness and width. Please choose according to your application.

• Sputtering Equipment
• aluminum
• Other semiconductor manufacturing equipment

The PREVAC-made film deposition controller "TMC-13" is a device equipped with a film thickness monitor/process control system, capable of monitoring and controlling six quartz oscillators. It features an easy-to-use 6.5-inch LCD touch panel and adopts a simple, compact design, allowing for the input of two vacuum gauges. The interface options include USB, RS232/485, Ethernet, and Bluetooth. The shutter system operates in automatic, timed, and film thickness modes with two channels at 0.6 bits, and it comes standard with analog output. It supports standard 6MHz quartz oscillators and utilizes a unit that can be used on the web. Additionally, we also sell "quartz oscillators" that can be used with this deposition monitor. For more details, please contact us or download the catalog.

• Evaporation Equipment
• controller

UHV-Design Ltd. in the UK is a specialized manufacturer of sample transport mechanisms for ultra-high vacuum applications. With over 15 years of experience and thorough quality control from design to production conducted in-house, we have received high praise in many countries. Among our offerings, the PP series of sample transport mechanisms boasts a rich lineup, and we take pride in being able to propose products tailored to our customers' needs. For more details, please download and view our catalog.

• Transport and handling robots

"Revolutionary Sample Transfer Mechanism That Enables Transfer and Delivery with One Unit" ■ In addition to the conventional sample transfer mechanism, which consists of two units for transfer and delivery (up and down movement), this mechanism allows for the entire process from sample transfer to delivery to be accomplished with a single unit. ■ By consolidating into one unit, it achieves subtle adjustments in sample movement to minimize the risk of sample drop during transfer. ■ Its unique features include excellent operability due to powerful torque transmission and compatibility with ultra-high vacuum conditions, allowing for baking at 250°C without removing the magnets, which is not offered by other companies. ☆ For more details, please download and view the catalog.

• Transport and handling robots

It is a high-performance valve that can be used in high vacuum areas with a bellows type.

• valve
• Pipe Fittings
• Vacuum Equipment

The EF40C1 was developed as an evaporation cell adapted for MBE equipment. It is made from a molybdenum-free material, allowing it to be used for low and medium melting point materials that evaporate in the range of 250 to 1500°C. For more details, please download and view the catalog.

• Evaporation Equipment

It is a converging ion gun that allows for easy adjustment of the ion beam spot diameter using a two-stage injection lens.

• Sputtering Equipment
• Electron beam lithography equipment

It is a compact and convenient ion gun for cleaning sample surfaces.

• Sputtering Equipment
• Electron beam lithography equipment

How about using the highly reliable leak sealant VACSEAL, which has been used for many years by NASA and many companies, as a standard remedy for vacuum in laboratories, research facilities, and factories? ■Features■ ● The main component is silicone resin. ● The operating temperature range is -200℃ to 450℃. ● It can bond to most solids. ● It is stable against liquid nitrogen. ● It can be used in vacuum environments such as high vacuum and ultra-high vacuum. ● It can be removed with organic solvents. ● Curing time is 15 minutes at 250℃, 30 minutes at 200℃, and 5 to 6 days at room temperature. ● The internal capacity is 3 ounces (85g).

• glue
• Chemicals

The American company SPI's "Silver Paste Plus" has a high concentration of silver particles, is homogeneous, and has a viscous characteristic. 【Features】 ● With a silver content of 72%, it demonstrates excellent conductivity. ● It has low evaporation of the liquid, allowing for stable use over a long period. ● A special thinner for Silver Paste Plus is available, making it easy to remove the adhesion of samples.

• glue

Sample heating supports resistance heating and EB heating, and PID temperature control is possible from -200 degrees to 2200 degrees in 0.1-degree increments using K-type and C-type thermocouples. Additionally, it can serve as a temperature control power supply for deposition cells, allowing for control of two zones of heaters, making it suitable for organic cells as well. All operations are via a touch panel, offering excellent usability and high-quality control power supply that takes safety into consideration.

• Other measurement, recording and measuring instruments

● There is no vacuum leakage due to the magnetic coupling. ● There is no backlash due to the transmission torque from high magnetic force. ● It is designed for ultra-high vacuum applications that can withstand baking up to 250°C. ● It can provide rigidity during rotation, allowing it to be held in place at the required position without a stopper. ● A wide variety of options are available to accommodate mounting flanges CF10 (outer diameter: 25.4mm) and CF100 (outer diameter: 152.4mm). ● There are unique hollow-type rotary feedthroughs and both-end shaft type rotary feedthroughs. ● The driving power options include DC motors, stepping motors, and compressed air systems. ● Three types of bearings can be custom-selected. ● By combining the standard rotary feedthrough with two types of hollow rotary feedthroughs, control of three-axis samples or substrates can be achieved. ● The standard rotary feedthrough is available in manual mode with a graduated dial or with a grip.

• Hydraulic Equipment
• Power Transmission Equipment

Are you replacing the entire window because the window glass has become dirty in devices like thin film deposition systems or vacuum processing equipment? By placing a cover glass in front of the vacuum-sealed window glass, you can clean or replace only the cover glass. The cover glass is made of thin materials, making it inexpensive and easy to replace.

• others

This quick CF component is a revolutionary product that allows the installation of CF flanges (conflat flanges), which were traditionally tightened with bolts, using only a chain clamp. Sizes range from CF34 to CF152, and you can continue to use the copper gaskets you have been using. 【Features】 ● Increased work efficiency in radiation-controlled areas due to reduced installation time. ● Safe to use without the worry of uneven tightening, thanks to the chain type (for equipment using toxic gases, etc.). ● Torque management allows anyone to perform accurate work (even newcomers in university laboratories can install it). ● Always in stock, enabling immediate delivery. ● Compatible with ultra-high vacuum. *For more details, please download the catalog or contact us.

• valve
• Pipe Fittings
• Piping Materials

Please use the "Vibration Isolator" that can reduce the vibration of turbo molecular pumps attached to devices such as surface analysis and precision processing by a ratio of 10:1. 【Features】 ● Compatible with ultra-high vacuum. ● Heat resistance temperature is 250°C. ● Vibration can be reduced by a ratio of 10:1. ● Compatible with CF flanges and ISO flanges. ● Compact design for easy installation. ● Uses formed bellows to maximize the effective inner diameter. *For more details, please contact us or download the catalog.

• Pipe Fittings
• Piping Materials
• Vacuum Equipment

To connect vacuum piping under external pressure or large-diameter flanges, a chain clamp is essential. VACOM's chain clamps can be selected based on flange size, application, and flange material. 【Features】 ● Assembly and disassembly are easy. Additionally, clamps can be selected according to material and application. ● The clamps securely tighten the flanges with a consistent torque value, eliminating concerns about vacuum leaks. ● Each chain body is robustly constructed to withstand not only internal vacuum pressure but also external pressure. ● A wide range of sizes from KF16 to KF100 is available, offering high versatility.

• Vice Clamps