【PREVAC】It is possible to monitor and control 6 quartz oscillators. It is easy to operate with a 6.5-inch LCD touch panel!
The PREVAC-made film deposition controller "TMC-13" is a device equipped with a film thickness monitor/process control system, capable of monitoring and controlling six quartz oscillators. It features an easy-to-use 6.5-inch LCD touch panel and adopts a simple, compact design, allowing for the input of two vacuum gauges. The interface options include USB, RS232/485, Ethernet, and Bluetooth. The shutter system operates in automatic, timed, and film thickness modes with two channels at 0.6 bits, and it comes standard with analog output. It supports standard 6MHz quartz oscillators and utilizes a unit that can be used on the web. Additionally, we also sell "quartz oscillators" that can be used with this deposition monitor. For more details, please contact us or download the catalog.
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basic information
**Features** - Capable of monitoring and controlling 6 quartz oscillators - Easy operation with a 6.5-inch LCD touch panel - Simple and compact design - Input for two vacuum gauges is possible - Interface options: USB, RS232/485, Ethernet, Bluetooth - Shutter → Two systems for automatic, timed, and film thickness control, 0.6 bit → Standard analog output included - Compatible with standard 6MHz quartz oscillators - Unit usable via the web - Frequency range: 2-6MHz → Frequency accuracy: 0.1Hz - Compatible with Rapid SE software and LabVIEW libraries - Film pressure: Configurable up to 0-9999000A → Resolution: 0.1A - Film deposition rate: Configurable up to 0-9999A/s → Resolution: 0.1A For more details, please contact us or download the catalog.
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Applications/Examples of results
【Purpose】 ○ As a film deposition controller for vapor deposition. For more details, please contact us.
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Company information
Teknoport has been the exclusive agent in Japan for overseas vacuum manufacturers, providing vacuum parts and vacuum component products to many domestic users for over 10 years. In addition to these sales achievements, we take pride in contributing to the development of the industry by introducing excellent overseas products to domestic vacuum manufacturers. Moving forward, we will continue to focus on the development and sales of products that meet the needs of our customers and the market, including new products, and we will strive daily to be of even greater service to everyone.