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  1. Home
  2. Machine elements and parts
  3. ケーエヌエフ・ジャパン KNF JAPAN
  4. Dry vacuum pumps and liquid pumps for the semiconductor industry.
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  • Feb 14, 2025
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Feb 14, 2025

Dry vacuum pumps and liquid pumps for the semiconductor industry.

ケーエヌエフ・ジャパン ケーエヌエフ・ジャパン KNF JAPAN
KNF provides state-of-the-art oil-free vacuum pumps and liquid pumps that meet the stringent standards of the semiconductor industry. - Reasons why diaphragm pumps are optimal for vacuum generation - Recirculation of inert gas for lithography lasers - Reasons why diaphragm pumps should handle semiconductor process liquids
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FM50_weiss.jpg

Liquid Quantitative Delivery Pump METERING PUMP FM50 Series

A state-of-the-art diaphragm liquid pump boasting extremely stable liquid flow, unprecedented flow accuracy, and reproducibility.

- Very stable liquid flow rate - Large flow range - Linear and predictable flow - Minimal variation in pump individual differences - High accuracy through end-of-line calibration - Self-sustaining, capable of dry running - Capable of handling fine particles - Brushless DC motor with digital customization options

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Liquid diaphragm pump "FM 50" *Quantitative liquid delivery pump

Self-sufficient, contamination-free, maintenance-free, wide range of variable flow, digital customization.

The liquid diaphragm pump "FM 50" achieves flow accuracy that surpasses our conventional diaphragm liquid delivery pumps, with a precision of ±2% and reproducibility of ±1%, providing stable liquid delivery with minimal flow variation due to pressure fluctuations. 【Features】 ■ Extremely stable liquid flow ■ Linear and predictable flow rate ■ No variation between pumps ■ High accuracy through calibration in the final stage ■ Safety in self-suction and dry running *For more details, please download the PDF or contact us directly.

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FP150_db_front.jpg

KNF FP1.150 Diaphragm Liquid Pump

High-output type, pulsation control design diaphragm liquid pump, ideal for inkjet printers, high-pressure cleaning systems, etc., with corrosion-resistant components also available.

- High discharge design, maximum allowable discharge pressure 0.6 MPa - Reduced pulsation in liquid delivery - Long lifespan design - Excellent linearity - Self-sustaining - Transfer of sensitive liquids - Abundant wetted materials Significantly reduces pulsation using five diaphragms, controls flow rate with an external signal to a brushless DC motor, and demonstrates a linear flow curve based on the control signal. It offers extensive customization for users' technical challenges and various optional parts are available.

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FK 1100 KPDCB-4.jpg

KNF FK1100 Diaphragm Liquid Pump

Durable, pulsation-reducing liquid pump FK100

- Pulsation-reducing liquid pump with new design - Variable flow control with brushless motor - Abundant wetted material options - Self-priming - NSF certified materials (optional) - AC motor specification (optional) Basic flow rate: 12.4 l/min (KP) / 11.5 l/min (KT) Suction lift: 4.5 mWg Discharge lift: 10 mWg

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FK 1.1100 KPDCB-4.jpg

KNF FK1.1100 Diaphragm Liquid Pump

Durable type, pulsation-reducing liquid pump FK100 with high discharge specifications, maximum allowable discharge pressure 0.6 MPa.

- Pulsation-reducing liquid pump with new design - Variable flow control with brushless motor - Abundant wetted materials - Self-sustaining - NSF certified materials (optional) - AC motor specification (optional) Basic flow rate: 12.4 l/min (KP) / 11.5 l/min (KT) Suction lift: 4.5 mWg Discharge lift: 60 mWg

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KNF Turbo Molecular Pump TMP Auxiliary Pump

TMP roughing pump (turbo molecular pump auxiliary pump)

The oil-free feature of diaphragm vacuum pumps eliminates contamination from oil mist and does not require oil replenishment, making them highly maintainable. They are ideal for use in clean rooms, such as turbo molecular pumps.

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fp400_front.jpg

KNF FP Series Pulsation Control Diaphragm Liquid Pump

Pulsation-reducing liquid pump, a diaphragm liquid pump that significantly reduces pulsation generated during pump suction and discharge.

We have reviewed the design of the pump itself as a liquid pump for pulsation reduction measures. Traditionally, pulsation reduction was achieved using dampers, but we have significantly suppressed pulsation with the pump itself. - FP70 Series We have integrated the pulsation reduction damper with the pump. - FP150 / FP400 / FK1100 Series We have increased the number of diaphragms to a maximum of five, allowing for the cancellation of pulsation within the pump. - FP1.150 / FP1.400 / FK1.1100 Series We have increased the number of diaphragms to a maximum of five, allowing for the cancellation of pulsation within the pump. Additionally, we have improved the maximum allowable discharge pressure to 6 bar (0.6 MPa), achieving smooth liquid transfer even under challenging pressure conditions.

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FP 70 KPDC iso.png

FP70 Series Diaphragm Liquid Pump

Pulsation Reduction Gentle Flow Diaphragm Liquid Pump

- The pulsation reduction feature allows for the transfer of liquids with minimal pulsation. - Due to the reduced pulsation, pressure loss in the tubing can be minimized. - It enables the transfer of liquids with fewer air bubbles. - It can reduce the optional parts for pulsation reduction measures. - Equipped with a newly developed valve, it can achieve self-priming suction even at lower motor speeds. - Flow rate adjustment is possible through brushless motor control. - Materials with NFS certification are also available. Basic flow rate: 700 ml/min Diaphragm material: EPDM / PTFE

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

  • NEW
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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Jan 23, 2026

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Non-contact light beam touch sensor "HA-T Series"

【Catalog now available!】Energy-saving automatic door sensors "HA-T401/HA-T520"

  • NEW
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The "HA-T Series" is an energy-saving automatic door sensor that opens only for those who wish to enter, whether on a busy street or in a narrow passageway. The automatic door opens simply by bringing your hand close, addressing hygiene concerns even in facilities used by a large number of people. You can choose between "Non-vision Mount Type/HA-T401" and "Non-vision Built-in Type/HA-T520" depending on the application and installation location. 【Recommended for such places!】 ☑ Entrance facing a busy corridor ☑ Presence of counters or signs near the door ☑ Buildings facing narrow passages ☑ Buildings that prioritize aesthetics ☑ Hospitals and facilities that consider hygiene ☑ Large facilities with many doors 【Features】 ● Adaptable to various door types with four detection spot settings ● Reduces unnecessary opening and closing, contributing to energy-saving by minimizing wasteful power consumption ● Equipped with a light touch function, allowing the door to open and close just by waving your hand, ensuring hygiene ● Can also be used as a wide detection range non-vision infrared sensor ◎ For more details, please download the materials or contact us.

Jan 23, 2026

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■■ Air Leak Tester | FLA-0200 / FLA-0201 series ■■ Fukuda's new flagship model. Equipped with mastering correction function, it enables high-precision measurements in a short time.

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Fukuda's new flagship model. - Masterless type (FLA-0200 series) - General type (FLA-0201 series) Two models of air leak testers. With the mastering correction function, high-precision measurements can be achieved in a short time. Please take a look at the catalog.

Jan 23, 2026

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PFAS Regulation Countermeasures! ■■ Leak Test Equipment for Small Electronic Components|MSA-0101 series ■■ Does not use fluorinated inert fluids. PFAS-free. Offers accuracy equal to or better than liquid immersion testing.

  • NEW
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● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!

Jan 23, 2026

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PIAB [Introduction of Innovation Video] Wrap Packaging and Suction Conveyance of White Trays for Food *Exhibited Product at Robodex Tokyo 2025*

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Introduction of "Piab Original Hand" At Piab, we have successfully achieved suction transport of "white tray wrap packaging," which has received many requests from the food industry, without leaving any suction marks. We will propose specifications that best meet your needs, including custom sizes. Please contact us first! (Piab Japan Co., Ltd.) Here is the video (YouTube) https://youtu.be/YIsCkhF3GhQ

Jan 23, 2026

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