Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

Overview and Features of TERPS
• High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation.
• Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure.
• Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa.
• Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas.
• Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃.
• High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications.
• Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.

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日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社 (旧)GEセンシング&インスペクション・テクノロジーズ株式会社 & GEエナジー・ジャパン株式会社