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  6. Druck High-Precision Silicon Vibrating Pressure Sensor TERPS 8000

Druck High-Precision Silicon Vibrating Pressure Sensor TERPS 8000

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last updated:Mar 25, 2025

日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社
日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社
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Achieving excellent stability and high precision! This is a pressure sensor with a structure that isolates the sensor element from the pressure medium.

The "TERPS 8000 Series" adopts TERPS (Trench Etching Resonant Pressure Sensor) technology. It combines accuracy, stability, reliability, and strength, delivering the best performance among Druck's pressure sensors. [Recommended for applications measuring differential pressure with two pressure sensors] The vibrating element is in a vacuum state, making it completely unaffected by changes in the density of the pressure medium, thus achieving excellent stability. [Features] - The first generation of pressure sensors utilizing TERPS technology - A structure where the sensor element is isolated from the pressure medium by a metal diaphragm and encapsulated silicone oil - The vibrating element is in a vacuum state, completely unaffected by changes in the density of the pressure medium - Achieves excellent stability *For more details, please refer to the PDF document or feel free to contact us. Please note that personal information registered with Ipros may be shared with our authorized dealers, and they may contact you. Thank you for your understanding.

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Druck High-Precision Silicon Vibrating Pressure Sensor TERPS 8000

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  • Related Link - https://www.druck.com/jp
  • Special site - Product/service details - https://pr.mono.ipros.com/bakerhughesds/product/

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【Other Features】 ■ High Precision: ±0.01% FS (non-linearity, hysteresis, repeatability, temperature characteristics) ■ Excellent Long-term Stability: ±0.01% FS/Year ■ Pressure Range: 200kPa (abs) to 7MPa (abs) and atmospheric pressure ■ Wide Temperature Range: -40℃ to +85℃ ■ TTL frequency and diode voltage analog output or RS-232, RS-485 digital output ■ Various pressure fittings and electrical connection connectors *For more details, please refer to the PDF document or feel free to contact us.

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High-precision silicon vibrating pressure sensor 'TERPS 8000 Series'

High-precision silicon vibrating pressure sensor 'TERPS 8000 Series'

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Pressure sensor compatible with hydrogen

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High-precision silicon vibrating pressure sensor 'TERPS 8100 Series'

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【Druck 2023 Latest Edition】 Pressure Gauge and Calibrator Product Guide

【Druck 2023 Latest Edition】 Pressure Gauge and Calibrator Product Guide

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Druck Pressure Measurement Technology Catalog "Testing to the Limits"

Druck Pressure Measurement Technology Catalog "Testing to the Limits"

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[Revised Edition] Comprehensive Guide to Druck OEM Products

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Druck's TERPS technology

Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

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Overview and Features of TERPS • High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation. • Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure. • Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa. • Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas. • Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃. • High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications. • Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.

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日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社 

日本ベーカーヒューズ株式会社&ベーカーヒューズ・エナジージャパン株式会社  (旧)GEセンシング&インスペクション・テクノロジーズ株式会社

Testing, Analysis and Measurement

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*When making inquiries, please specify the brand name and product name. * Baker Hughes, a GE company, is an energy technology company that provides solutions to the global energy industry operating in over 120 countries. We aim to create energy that is safer, cleaner, and more efficient for people and the planet. Baker Hughes Japan, the Japanese subsidiary (formerly GE Sensing & Inspection Technologies), offers moisture meters, analyzers, and flow meters under the Panametrics brand, pressure gauges and pressure calibrators under the Druck brand, and high-performance gamma and neutron detectors for radiation monitoring applications under the Reuter-Stokes brand.

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