Failure analysis using the Corial 300 series.
The Corial 300 series is a plasma etching device designed for processing 300mm wafers. On the other hand, by using our proprietary shuttle line, it is also possible to perform etching on diced individual chips with the same device. Therefore, failure analysis on 300mm wafers and failure analysis on individual chips can be completed with a single device.

Inquiry about this news
Contact Us Online




