プラズマ・サーモ・ジャパン Company Profile

Plasma-Therm, a global manufacturer of advanced plasma processing equipment that supports semiconductors, compound semiconductors, photonics, and quantum technologies, announced its collaboration with Elevate Quantum, which aims to accelerate the commercialization of quantum technology in the United States, having been designated as a quantum tech hub by the U.S. Department of Commerce's Economic Development Administration (EDA).

In June of this year, an international workshop on plasma etching and ashing in the field of microtechnology, PESM2026 (Plasma Etch And Strip in Microtechnology), will be held in Grenoble, France. Our Plasma-Therm factory in France is located near the workshop venue. Therefore, we would like to offer an opportunity for those planning to attend the workshop to visit our factory. This will be a great chance to see cutting-edge plasma processing technology, manufacturing equipment, and process development environments, so please feel free to stop by. If you are interested, please contact Plasma-Therm Japan.

The Corial 300 series is a plasma etching device designed for processing 300mm wafers. On the other hand, by using our proprietary shuttle line, it is also possible to perform etching on diced individual chips with the same device. Therefore, failure analysis on 300mm wafers and failure analysis on individual chips can be completed with a single device.