プラズマ・サーモ・ジャパン Company Profile

We will be exhibiting at the technical exhibition corner of the "MEMS Engineer Forum 2025" to be held from April 16 to 17, 2025. <Exhibition Contents> 1. Introduction of low-temperature, low-damage etching and cleaning equipment using high-density radicals. Our patented HDRF technology eliminates yield issues in MEMS. 2. Introduction of processing technology (ion beam etching) essential for future high-frequency devices and high-speed optical modulation waveguide processing. Ion beam etching is optimal for processing multilayer structures, allowing for angle adjustment of the processing surface and roughness adjustment of sidewalls. 3. Introduction of plasma etching and film deposition equipment suitable for batch processing of compound semiconductors. Multiple wafers can be loaded onto a "shuttle" (wafer carrier) for batch processing. This equipment is suitable for small-scale production. We look forward to your visit.

"Semicon Japan 2024" will be held from December 11 (Wednesday) to December 13 (Friday) from 10:00 to 17:00 at Tokyo Big Sight. Our booth number is 4032. We will be holding seminars at our booth according to the schedule below, so please come and visit us. ◇HDRF - Introduction of a new technology that can remove polymers and HDI resist at low temperatures using high-density radicals. ◇KOBUS FAST - Introduction of a new technology that enables ALD-like film deposition at CVD film deposition rates. ◇Schedule December 11: 10:30~10:50 HDRF 14:00~14:20 KOBUS FAST December 12: 10:30~10:50 KOBUS FAST 14:00-14:20 HDRF December 13: 10:30~10:50 HDRF 14:00~14:20 KOBUS FAST

TFE-Thin Film Equipment Srl, based in Nabisco, in the suburbs of Milan, Italy, has been designing and manufacturing thin film deposition equipment for nearly 40 years, providing thin film deposition systems across various fields. For example, thin film deposition at low temperatures of around 50 degrees allows for the coating of plastic products, and the tray-type sample trays enable the formation of electrodes for piezoelectric elements of different sizes, as well as decorative coatings and protective film coatings for objects of varying shapes. These systems can be used for various applications, including medical products, sensors, and probe cards. Demonstrations are available, and customization is supported. From product launch to maintenance, Plasma Therm Japan will provide support in Japanese.