【Technical Information】Dilution of CMP Slurry

CMP slurry may be used after dilution according to the manufacturer's recommendations. Since the recommended conditions and expressions vary depending on the manufacturer and product specifications, it is necessary to start using it only after fully understanding these aspects.
■ Is the dilution by weight ratio or volume ratio?
The manufacturer provides recommendations for dilution ratios, but the ratio may change depending on whether it is by weight or by volume, so caution is required.
Example) When diluting Slurry A (specific gravity 1.38) with pure water:
1) Weight 3 times dilution: Adjust 10 kg of slurry with 20 kg of pure water.
2) Volume 3 times dilution: Adjust 10 L (=13.8 kg) of slurry with 20 L of pure water.
■ Dilution procedure
CMP slurries are designed to maximize their characteristics, and there are products available in packaging forms such as two-component or three-component systems. The manufacturer may recommend dilution procedures for reasons such as ensuring the stability of the slurry.
Example) When diluting a two-component slurry (Component A and Component B) with pure water:
1) Dilute Component A with pure water.
2) Add Component B to the mixture from step 1.
Since various cases can be considered depending on the manufacturer and product specifications, it is recommended to contact the manufacturer for more details.

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