Achieving high-precision inspection with high-resolution, clear images.
Automatic inspection device for wafer chip appearance capable of expanding upper inspection.
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【Features】 ○ Automatic inspection of chip appearance on wafers and expanding using clear images produced by a special high-resolution zoom lens. ○ Equipped with a 5-megapixel monochrome camera, capable of an image resolution of 1.5μm/pixel. ○ Comprehensive data filing functions, including a visual review feature with adjustable optical magnification after automatic inspection. ○ Wafer size: Compatible with 2, 4, and 6-inch (expanding compatible). ○ Workpiece fixation: Air suction type. ○ Workpiece movement: X=250mm, Y=150mm, θ=±30. ○ Adoption of a 5-megapixel monochrome camera: Resolution 1.5μm. ○ Adoption of APO zoom optical system: Variable field of view from 4.5mm. ○ Batch inspection of multiple chips on a single screen. ○ Automatic bad marking of defective chips and bad marking judgment function included. ○ Inspection functions: Chipping, dirt, foreign objects, cracks, scratches, pattern abnormalities. ● For other functions and details, please contact us.
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Throughout history, humanity has built up civilization, seeking the next level of lifestyle and measuring technological innovation. At the same time, there is a call to reconsider the Earth's environment and human hearts and cultures. We seek romance in the "advancement of science and technology" and "harmony in human life," and we will devote our limitless creative power to the provision of services, information, and technology, becoming "one body with different forms."
