This is a flow control device that adopts a pressure control method for ultra-high purity applications.
A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.
Inquire About This Product
basic information
1. The control flow is not affected by fluctuations in supply pressure. 2. Fast response time (less than 0.5 seconds) 3. Excellent accuracy (within ±1.0% S.P. for standard type) 4. Equipped with MGMR (Multi-Gas Multi-Range) function 5. Not affected by installation position. 6. Equipped with flow self-diagnosis function 7. Does not select gas types 8. RoHS compliant
Price range
Delivery Time
Applications/Examples of results
Please refer to the detailed product catalog.
catalog（1）
Download All Catalogs
News about this product（12）
Company information
Fujikin is a cutting-edge manufacturer of ultra-precision fluid control systems, focusing on specialized valve equipment. Since its founding in 1930, the company has consistently challenged the limits and made it its corporate policy to exceed the ultimate in technology. We support people's lives and society across a wide range of fields, including semiconductors, hydrogen, pharmaceuticals, analysis and measurement, and space. We will continue to contribute to a sustainable society through comprehensive technology in fluid control equipment and systems. Please feel free to contact us if you have any inquiries.