Stable performance can be achieved even against vapors such as water vapor and solvents. 【ULVAC】
By combining with dry pumps, oil-sealed rotary vacuum pumps, water-sealed pumps, etc., it is possible to increase the exhaust speed in the range of 10,000 to 0.1 Pa, where the exhaust speed of the roughing pump decreases. The PRC-A series, like the PMB-C(M), is designed primarily for use in semiconductor and liquid crystal manufacturing processes that require cleanliness both inside and outside the pump, as well as for general-purpose applications. The PMB-040C and PMB-060C are optimal for large capacity exhaust in thermal treatment furnaces, melting furnaces, and large film deposition equipment. 【Product Lineup】 ○PMB-001C, CM ○PMB-003C, CM ○PRC-003A ○PRC-006A ○PRC-012A For more details, please contact us or download the catalog.
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basic information
**Features** ○ Oil-free → Since there is no lubricating oil in the casing chamber, stable performance can be achieved against steam such as water vapor and solvents. ○ Equipped with a canned motor → By adopting a canned motor, it has become possible to eliminate mechanical seals for atmospheric/vacuum applications. → There is no concern about oil leakage, allowing for use in a clean environment. ○ Excellent corrosion-resistant surface treatment → The main components are treated with anodizing, which has high surface hardness and excellent corrosion resistance, reducing damage and corrosion inside the pump. → An option without surface treatment is also available. ○ Atmospheric pressure drive type effective for reducing exhaust time (Option: Inverter) → Since simultaneous startup with a roughing pump is possible, exhaust time can be shortened compared to standard types. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Vapor deposition, sputtering, ion plating ○ Vacuum drying, freeze drying, vacuum degassing ○ Analyzing instruments, leak testing equipment ○ Gas replacement, filling, vacuum insulation ○ Heat treatment furnaces, melting furnaces ○ Various other vacuum devices ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.