From single-layer films to multi-layer films, it can be used for a wide range of deposition control. 【ULVAC】
The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ～ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ～ 40℃, Humidity: 5 ～ 95% RH (without condensation) For more details, please contact us or download the catalog.
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basic information
【Features】 ○ 2 Sensor Connection → Up to two single sensors can be connected (simultaneous measurement is not possible, switchable) ○ High-Speed Sampling → The sampling rate is fast (125ms), enabling responsive control ○ Multi-Layer Film Control → Continuous multi-layer film control of up to 99 layers is possible ○ 99 Types of Deposition Programs → Up to 99 types of deposition sequences can be programmed/memorized ○ Up to 30 Process Programs → Up to 30 process programs can be saved in the main memory ○ Upper-Level Communication → Equipped with RS-232C for upper-level communication as standard, making control from a PC easy ○ Programmable Digital Input/Output → 12 channels of digital input/output signals can be programmed, allowing flexibility in device connections ○ 3 Channel Analog Output → In addition to POWER, there are 3 channels of programmable analog output including RATE and THK as standard ○ Detailed Control → Preheating and film deposition speed control can each be input in up to 3 stages, allowing for more precise control ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Purpose】 ○ Control of film thickness and deposition rate during evaporation ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
