Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]
The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.
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basic information
【Features】 ○Uniform heating in low temperature range (LR series) → In addition to the PVD process, shortening the evacuation time is crucial for the extraction chamber to increase throughput, making it optimal for evacuation. ○Uniform heating in high temperature range (HR series, UR series) → It is possible to discharge sublimable exhaust substances generated during CVD, etching, etc., in gaseous form. → The UR series allows for even higher temperatures than the HR series. ○Helium tight → Extremely safe due to a sealed structure equipped with a canned motor. ○Power interruption measures → Measures are implemented for power interruptions within 500 msec. ○Excellent corrosion resistance → Special surface treatment with high surface hardness and excellent corrosion resistance is standard for major components. → Reduces corrosion inside the pump during the exhaust of corrosive gases. ○Communication functions → It is possible to read data regarding the pump's operating status and warning/alarm history. → Centralized monitoring is possible by using dedicated software for computer communication. ○CE compliance available → CE compliance is an option specified at the time of order. ● For more details, please contact us or download the catalog.
Price information
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Delivery Time
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Applications/Examples of results
【Applications】 ○ Exhaust of active gases (CVD, dry etching, etc.) ○ Exhaust of inert gases (sputtering, deposition, thermal treatment, etc.) ○ Reduction of exhaust time in loading and unloading chambers (LR series) ○ Exhaust in processes generating powders (e.g., Si single crystal pulling) ○ As a supplementary exhaust pump (assisting turbo molecular pumps and mechanical booster pumps) ● For more details, please contact us or download the catalog.
catalog（1）
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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