Energy-saving dry vacuum pump ER100D/ER100DC

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last updated：Feb 26, 2026

Osaka Vacuum, Ltd.

Achieving top-class energy efficiency, compact size, and lightweight even among the same class!

The energy-saving dry vacuum pump ER100D/ER100DC has achieved top-class energy efficiency, compactness, and lightweight design among dry vacuum pumps in the same class. It is energy-efficient, with a power consumption of 400W at the target pressure. It is compact and lightweight, with a footprint of 0.11m² (230×450mm) and a weight of 60kg. It also reduces cooling water and purge gas usage, resulting in lower utility costs. Compliant with international standards, we offer product specifications tailored to various applications. The ER100D is ideal for exhaust in light-load, clean processes, while the ER100DC uses highly corrosion-resistant materials to handle exhaust of corrosive gases. For more details, please contact us or refer to the catalog.

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basic information

【Features】 ○ Achieves energy savings, compactness, and lightweight design ○ Energy-saving compatible → Power consumption at target pressure: 400W ○ Achieves compactness and lightweight design → Installation area: 0.11m2 (230×450mm) ○ Weight: 60kg ○ Utility savings → Reduction in cooling water and purge gas amounts ○ Complies with international standards ○ Product specifications tailored to applications → ER100D: Ideal for exhaust of light loads and clean processes → ER100DC: Made with highly corrosion-resistant materials, suitable for exhaust of corrosive gases ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

【Applications】 ○ Clean process exhaust and corrosive gas exhaust → Semiconductors, LCDs, LEDs, and other general industries ○ Rough pumping for sputtering equipment ○ Auxiliary pumps for high vacuum pumps like TMP ○ Exhaust for load lock chambers and transport chambers ○ Exhaust for small experimental devices ○ Adsorption transport systems ○ Exhaust for analysis and measurement devices ○ Exhaust for small furnaces ○ Exhaust for electron gun sources and ion gun sources ● For more details, please contact us or refer to the catalog.