Achieving high precision and high resolution under high pressure with revolutionary simplicity and ease of use【ULVAC】.
The Qulee CGM series is a new type of residual gas analyzer/process gas monitor from ULVAC that achieves high precision and high resolution under high pressure (below 1 Pa) with revolutionary simplicity and ease of use. It represents the new standard for process monitors shaped by the voices of equipment technology professionals in various production lines. It is ideal for process management in sputtering equipment (improving quality and yield). 【Specifications】 ○ Mass separation method: Quadrupole mass spectrometer ○ Mass range: 1 to 50 amu ○ Resolution: M/ΔM = 1M (10% P.H.) ○ Maximum operating pressure: 2 Pa (FC) 1×10⁻² Pa (SEM) ○ Linearity: 1 Pa For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Optimal for sputtering devices → Ideal for process monitoring of various sputtering devices ○ No differential pumping system required → No differential pumping system needed for process monitoring (measurable below 1 Pa, space-saving) ○ Integrated display design → Can measure without a PC ○ Easy operation → One Click function (simple for anyone, no complex operations required) ○ Baking compatible → High-temperature baking up to 120°C possible when connecting the sensor unit (separated sensor unit state: 250°C) ○ Equipped with degassing function → Adoption of electronic impact desorption method ○ Enhanced preventive maintenance features → Preventive maintenance for ion sources and secondary electron multipliers Traceability function for analysis tubes (Patent No. 5016031) ○ Enhanced leak test functions → Capable of helium leak tests, air leak tests, and build-up tests ○ Total pressure measurement → Total pressure measurement possible (ionization vacuum gauge function) ○ Compatible with Qulee QCS → Software standard equipped (compatible with Windows XP/7) ○ Compliance standards → CE standard compliant ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Process monitoring for various manufacturing equipment such as solar cells, FPDs, and semiconductors (sputtering equipment) ○ Residual gas analysis of sputtering equipment ○ Management of residual moisture in roll-to-roll sputtering equipment ○ Management of impurities (H2O) in sputtering equipment ○ Leak testing for various vacuum devices ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.