It is ideal for equipment management of vacuum deposition devices and various vacuum furnaces. [ULVAC]
This is ULVAC's new residual gas analyzer, realized with revolutionary simplicity and ease of use. It marks the arrival of a new standard in process monitoring, shaped by the voices of equipment technology professionals from various production lines. It is ideal for managing vacuum deposition systems and various vacuum furnaces. 【Features】 - Integrated display design... Measurement possible without a computer - Easy operation - One Click function... Simple for anyone. No complex operations required - Enhanced leak test functionality - Capable of total pressure measurement - Qulee QCS software is standard For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Excellent cost performance → Ideal for RGA applications ○ Integrated display design → Measurement possible without a PC ○ Easy operation → One Click function (simple for anyone, no complex operations required) ○ Baking support → High-temperature baking up to 120℃ possible when connected to the sensor unit (Separated sensor unit state: 250℃) ○ Degassing function included → Adoption of electronic shock desorption method ○ Enhanced preventive maintenance features → Preventive maintenance for ion source and secondary electron multiplier Traceability function for analysis tube included (Patent No. 5016031) ○ Enhanced leak test features → Helium leak test, air leak test, and build-up test possible ○ Total pressure measurement → Total pressure measurement possible (ionization vacuum gauge function) ○ Compatible with Qulee QCS → Software standard included (compatible with Windows XP/7) ○ Option for QIP (Quick Install Package system) available → Automatic measurement start/stop/data saving function ○ Compliance standards → CE standard compliant ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Residual gas analysis of various manufacturing equipment such as solar cells, FPDs, and semiconductors ○ Residual gas analysis of film deposition equipment such as PVD systems and vacuum deposition systems ○ Residual gas analysis of roll-to-roll deposition equipment ○ Residual gas analysis of organic EL equipment ○ Residual gas analysis of high vacuum exhaust systems ○ Residual gas analysis of freeze-drying equipment ○ Various gas analyses for research and development ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.