No power supply unit required; control and flow measurement can begin immediately after installation.
This is a mass flow controller/mass flow meter that combines a high-precision flow sensor with a fast response (within 0.3 seconds) and a wide range of flow control valves (proportional solenoid valves) to achieve high performance. (Models with protection rating IP 65 are available.)
Inquire About This Product
basic information
【Features】 ◆ We will inquire in advance about the measuring gas, flow rate, and operating pressure, and perform actual gas calibration before shipping from the factory. There is no need to individually input gas coefficients. ◆ Gas control and flow measurement can be performed immediately after installation. ◆ No special power supply unit is required. ◆ We will provide optimal proposals based on your application and usage conditions from a wide range of product lineup. ◆ Input and output signals and power are wired through connectors. Various connectors are available, so you can choose the one that suits your needs. ◆ Various settings for mass flow controllers/mass flow meters can be checked and changed via a computer. The software can be downloaded for free from our website (connectors are required separately). ◆ Models with protection rating IP 65 are available.
Price information
The price varies depending on the quantity, so please feel free to contact us.
Price range
P3
Delivery Time
Applications/Examples of results
■Gas flow control in thin film synthesis processes ■Ammonia removal device ■Exhaust gas combustion device for semiconductors ■Gas flow control for various analytical instruments
catalog（1）
Download All Catalogs
Company information
Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.