[Analysis Case] Visualization of Strain at Heterojunction Interfaces in Compounds
Lattice image analysis using the FFTM method
The Fast Fourier Transform Mapping method is a technique that performs a Fourier transform on high-resolution TEM images to analyze and visualize the minute lattice distortions of crystals from the spot positions of the FFT pattern. Through FFTM analysis, it is possible to (1) analyze lattice distortions in the x and y directions of the image, (2) analyze lattice distortions in the crystal plane direction, (3) analyze the distribution of crystal plane spacing and crystal plane orientation, (4) display the data distribution as a histogram, and (5) detect distortions of 0.5% with a spatial resolution of 5 nm. An example of its application to compound heterojunction multilayer film samples is presented.
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Measurement Method: TEM Product Field: Lighting and Optical Devices Analysis Purpose: Structural Evaluation, Stress, Strain Evaluation
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