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  6. Ceramic products porous chuck

Ceramic products porous chuck

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last updated:Mar 10, 2011

NTKセラテック
NTKセラテック
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Create materials and someday create the future.

Through planar smoothness and special manufacturing techniques, we provide high productivity and reliability in manufacturing processes that require full adhesion of wafers and large substrates, with excellent adsorption characteristics and high durability. The porous body offers flexibility in the selection of materials and pore size according to user needs.

    Ceramics
1_01_04_porous-chuck_220.jpg

Ceramic products porous chuck

1_01_04_porous-chuck_220.jpg
1_01_04_porous-chuck_220.jpg
  • Related Link - http://www.ceratech.co.jp/product/01_01.html

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basic information

【Features】 ○ Integrated structure of the porous body and base Thanks to our unique technology, the interface between the base and the porous body has an integrated structure. This allows for exceptionally excellent flatness of the adsorption surface. ○ Abundant lineup of porous bodies Materials can be selected according to customer applications, and pore diameter and porosity can be controlled within the following ranges: - Material: Alumina, Silicon Carbide - Pore diameter: 5, 10, 30, 70 μm - Porosity: 30–60% ○ Shapes can be customized We can meet customer needs with round or square shapes. Ventilation groove patterns can also be formed as desired. ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

- For processing silicon wafers - For transporting glass substrates - For fixing film sheets and metal substrates

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Ceramic products porous chuck

Ceramic products porous chuck

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NTKセラテック

NTKセラテック

Ceramics

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NTK Ceratec is a manufacturer that develops its business centered around ceramics. With the slogan "Enjoying creativity and challenges with ceramics," we listen to the needs of each individual user, strive to solve their problems, and aim to be of assistance. In cutting-edge fields of the era, including semiconductor and LCD manufacturing, as well as electronic devices, we pursue total solutions through engineering and electronics ceramics, constantly developing and providing innovative technologies and materials. As a good corporate citizen, we aim to be a company loved by our customers, the local community, and everyone involved with us, contributing to society.

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