Create materials and someday create the future.
This is an ultra-precise vacuum chuck made using Poafree-type ceramic materials, pursuing ultimate planar smoothness. It accommodates various types of wafers and guarantees smoothness even in the currently mainstream φ300mm size.
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basic information
【Features】 ○ High precision: Flatness of 0.2μm, L/F below 0.1μm ○ Material selectivity: Crystallized glass, SiC, conductive ceramics ○ Shape control: Chuck shape according to wafer shape ○ Low particle generation: Pore-free, Double-Polishing ● For more details, please contact us or refer to the catalog.
Price information
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Delivery Time
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Applications/Examples of results
- Vacuum suction chucks for wafer inspection machines - Fixed jigs for wafer processing
catalog（1）
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Company information
NTK Ceratec is a manufacturer that develops its business centered around ceramics. With the slogan "Enjoying creativity and challenges with ceramics," we listen to the needs of each individual user, strive to solve their problems, and aim to be of assistance. In cutting-edge fields of the era, including semiconductor and LCD manufacturing, as well as electronic devices, we pursue total solutions through engineering and electronics ceramics, constantly developing and providing innovative technologies and materials. As a good corporate citizen, we aim to be a company loved by our customers, the local community, and everyone involved with us, contributing to society.
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