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  6. High-precision porous ceramic vacuum chuck "Aerofix"

High-precision porous ceramic vacuum chuck "Aerofix"

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last updated:Jun 04, 2026

ナノテム
ナノテム
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Float, stop, transport! We solve challenges with our unique ceramics sintering technology.

"Aerofix" is a vacuum chuck made of porous ceramics. Thanks to NanoTem's unique ceramic sintering technology, which controls the eutectic reaction between the main agent and the auxiliary agent, it uniformly generates pores of 2μm. It achieves a porosity of 40%, balancing lightness and strength. It can be used in dry environments, as well as wet environments and high-temperature environments up to 150°C. Please feel free to contact us when needed. 【Features】 ■ Solves contamination issues of workpieces such as ultra-thin substrates as an electrostatic prevention material ■ High-performance, high-precision uniform adsorption force ■ Partial adsorption capability ■ Suction roll that realizes space-saving ■ Achieves non-contact floating transport that reduces the risk of contamination of workpieces ■ Simple and cost-effective, just place it on existing equipment *For more details, please download the PDF or feel free to contact us.

    Chuck
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High-precision porous ceramic vacuum chuck "Aerofix"

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  • Related Link - http://www.nano-tem.com/
  • Special site - Product/service details - https://pr.mono.ipros.com/nano-tem/product/

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【Specifications of Black 2μm Regular Type (Partial)】 ■ Pore Diameter (μm): 2 ■ Hardness (HRH Scale): 90 ■ Porosity (%): 40 ■ Bending Strength (MPa): 50 ■ Main Raw Material: Alumina *For more details, please download the PDF or feel free to contact us.

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ナノテム

ナノテム

Manufacturing and processing contract

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Our company is engaged in the manufacturing and sales of special grinding stones, vacuum suction plates, and surface grinding machines, as well as contract processing services for precision grinding, polishing, and dicing. We also handle high-precision porous ceramic vacuum chucks, such as "Aerofix." Please feel free to contact us if you have any inquiries.

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