High-precision porous ceramic vacuum chuck for clean rooms

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Aerofix

last updated：Jul 13, 2026

ナノテム

We support dust-free transportation in clean rooms with lightness and strength.

In cleanroom dust-free transport, it is essential to prevent the contamination of fine foreign substances and maintain product quality. Particularly in the transport of delicate workpieces, it is crucial to minimize the risk of contamination and damage due to contact. Our high-precision porous ceramic vacuum chuck and roll, "Aerofix," addresses these challenges by enabling non-contact transport, thereby reducing the risk of workpiece contamination. 【Usage Scenarios】 - Substrate transport within cleanrooms - Wafer transport in semiconductor manufacturing processes - Dust-free transport of precision parts - Non-contact transport of films 【Benefits of Implementation】 - Reduced risk of workpiece contamination - Prevention of scratches during transport - Improved quality through maintained cleanliness

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【Features】 - Solves contamination issues of workpieces, such as ultra-thin substrates, using electrostatic prevention materials - High-performance, high-precision uniform adhesion force - Partial adhesion capability - Space-saving suction roll - Achieves non-contact floating transport to reduce contamination risks of workpieces - Simple and cost-effective, just place it on existing equipment 【Our Strengths】 We manufacture and sell special grinding wheels, vacuum suction plates, and surface grinding machines, and we also offer precision grinding, polishing, and dicing contract processing services. Based on years of experience and technology, we provide products tailored to our customers' needs. Our high-precision porous ceramic vacuum chuck, "Aerofix," has also been developed to contribute to improving customer productivity. Please feel free to contact us when needed.