Porous ceramics are ceramics that have many pores.
At Asuzak Corporation's Fine Ceramics Division, we have started working with porous ceramics, offering two types of materials: porous alumina and porous SiC. Currently, we have several types in our lineup, catering to your needs based on different applications. We propose porous ceramics that allow for free control of pore diameter and porosity thanks to our unique molding technology. Porous ceramics are used as adsorption tools for thin wafers and thin films. They allow gas to pass through but not plasma, making them suitable as fixtures for plasma devices. Being porous ceramics, they possess insulation and heat resistance. Depending on the size, we can achieve a flatness of about 5μm, enabling high precision in equipment. How about this usage? In addition to general porous alumina ceramics, we also handle porous ceramics made of SiC, so please consider using porous SiC in environments where alumina cannot be used (such as rapid cooling, rapid heating, and the use of hydrofluoric acid-based chemicals). How about using it in the manufacturing of optical lenses where rapid cooling and heating are required?
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basic information
Among porous ceramics, we offer alumina materials 【AZP60】, 【AZPW40】, 【AZPW45】, and SiC material 【AZPS40】, which differ in porosity. Please choose according to your application. ◆Characteristics of Porous Ceramics ●Material: High-purity alumina (purity 99.6%), silicon carbide (SiC) ●Low thermal conductivity ●Low dielectric constant ●Complex shapes can be manufactured, including screw machining (tapping, bushes, inserts) ●Porosity can be adjusted ◆Applications of Porous Ceramics Product examples: Chucks using porous ceramics ●Porous vacuum ceramic chucks ●Lightweight components (specific gravity: lighter than aluminum) ●Insulation plates ●Adsorption plates ●Materials to prevent film peeling in film deposition devices ●Applications as low dielectric materials ◆Types of Porous Ceramics We offer several types of porous ceramics due to differences in manufacturing methods. Please choose according to your needs. The higher the porosity, the easier it is for air to pass through. Porosity can be adjusted, so please consult us separately.
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※The delivery date may vary depending on your inquiry, so please feel free to contact us.
Applications/Examples of results
● Porous vacuum ceramic chuck ● Lightweight components (specific gravity: lighter than aluminum) ● Insulation plate ● Adsorption plate ● Film peeling prevention components for film formation devices ● Applications as a low dielectric material
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Company information
At Asuzac Co., Ltd., Fine Ceramics Division, ● We can manufacture top-class large alumina plates. ◇ We can handle everything from material sales to processing into desired shapes for alumina plates exceeding 3 meters in length! ● With top-level processing technology, we can produce silicon carbide (SiC) in a short delivery time. ◇ We also offer high-purity products and can handle mass production. We are particularly skilled in plate shapes! ● We can accommodate small lots and single items as well. ◇ We also provide VE and VA proposals! We are engaged in the development, manufacturing, processing, and sales of fine ceramics (various ceramics such as alumina, silicon carbide SiC, zirconia, low thermal conductivity ceramic Alusima, black alumina, porous alumina, etc.). For more information, please visit our corporate website (http://www.asuzac-ceramics.jp/).