The introduction of a ceramic transport hand for the atmosphere that minimizes particle generation risk to the extreme!
In semiconductor manufacturing equipment, there is often a demand for end effectors (the hand part of a transport robot) to be made from lighter, stronger, and less deflective materials. Processes that want to handle many wafers at once require wafers to be loaded into small clearance slits, leading to the use of thinner ceramic end effectors. Transport hands (end effectors) equipped with suction mechanisms need to have internal flow paths, but using adhesive for SUS bonding increases the risk of foreign material contamination. Our ceramic suction transport hands, made with our hollow integrated technology that eliminates the risk of metal contamination and particle ingress, have become the industry standard. PeriZac has further reduced particles by innovating the contact area and position of the wafer, gently holding the non-circuit outer peripheral part. They have received positive feedback from semiconductor device manufacturers aiming to improve yield.
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basic information
【Product Overview】 Product Name: PeriZac Material: Alumina Size (mm): 330 x 226 x 2.3 Compatible Wafer Size: 12 inches Release Date: August 2020 【Product Features】 - Reduces particle generation due to contact by adsorbing the wafer's back surface at a 3mm outer circumference. - Uses a material for the guide that is less likely to damage the wafer. - Enables thin design using a unique hollow integrated technology that does not use adhesive. - Supports options such as sensor installation. Wafer Outer Circumference Adsorption Ceramic Hand 【Product Specifications】 This is a hand designed for atmospheric specifications. It adsorbs the wafer's outer circumference at four points for transport. It can accommodate modifications to the mounting hole processing, root length, and width. 【Contact Information for Inquiries】 Asuzac Co., Ltd. Fine Ceramics Division Technical Sales Kobayashi TEL: 026-248-1626, FAX: 026-251-2160 【Contact Information for Product Purchases and Inquiries】 Asuzac Co., Ltd. Fine Ceramics Division Technical Sales Kobayashi TEL: 026-248-1626, FAX: 026-251-2160 Reception Hours: 9:00 AM - 5:00 PM (excluding Saturdays, Sundays, and holidays)
Price information
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Price range
P3
Delivery Time
P4
※It may vary depending on the presence or absence of processing, sensors, etc., so please feel free to contact us.
Applications/Examples of results
As an end effector for gripping wafers in transport robots, it is used in EFEMs, stockers, and various semiconductor manufacturing equipment.
Company information
At Asuzac Co., Ltd., Fine Ceramics Division, ● We can manufacture top-class large alumina plates. ◇ We can handle everything from material sales to processing into desired shapes for alumina plates exceeding 3 meters in length! ● With top-level processing technology, we can produce silicon carbide (SiC) in a short delivery time. ◇ We also offer high-purity products and can handle mass production. We are particularly skilled in plate shapes! ● We can accommodate small lots and single items as well. ◇ We also provide VE and VA proposals! We are engaged in the development, manufacturing, processing, and sales of fine ceramics (various ceramics such as alumina, silicon carbide SiC, zirconia, low thermal conductivity ceramic Alusima, black alumina, porous alumina, etc.). For more information, please visit our corporate website (http://www.asuzac-ceramics.jp/).
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