Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.
You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.
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basic information
【Product Features】 ○ Flexible installation position ○ Rapid start and stop ○ Tuning-free ○ Speed control ○ Serial communication capable ○ Oil-free ○ High flow exhaust ○ Compliance with safety standards (NRTL/SEMI-S2/CE) ● For other functions and features, please refer to the catalog or contact us.
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Company information
We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.