A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!
It is ideal for high-performance electron microscopes, fine drawing devices, and analytical instruments.
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basic information
【Product Features】 ■ Successfully reduced the vibration value of the pump body to below 1nm! *According to our measurement method ■ Equipped with a dedicated anti-vibration damper to further reduce the vibration value by one order of magnitude! ● For other functions and features, please refer to the catalog or contact us.
Price information
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Delivery Time
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Applications/Examples of results
■ Next-generation semiconductor manufacturing equipment, including EUV lithography systems ■ High-precision and high-performance electron microscopes, analytical instruments, and measurement devices
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Company information
We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.