Non-contact high-precision air servo length measurement sensor "Air Scanner DS-16hs"
DS-16hｓ
Minimum resolution of 0.02μm! Accurately measures displacement of thickness, height, and flatness without contact. Ideal for measuring step heights of small glass and shapes of large glass.
Various measurements made possible by non-contact technology. Calibration can be easily done with a reference gauge! Convenient for comparative measurements. Accurately measures deviations in thickness, height, and flatness. We can achieve the resolution and size that meet your needs. Suitable for items that are difficult to measure with optical measuring equipment. Please feel free to contact us. For more details, please download the catalog.
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basic information
【Features】 ○ Among non-contact measurements, it is considered difficult to measure due to changes in color and material. However, the air scanner, which can maintain a constant air reflection pressure from the nozzle, allows for non-contact measurements of various materials without being affected by color or material. ○ The high precision of the air scanner is due to its internal structure operating without contact. ○ It is also capable of force control using air, which allows for the measurement pressure to be consistently maintained, and its low pressure (below 1g) is another characteristic. ○ Despite being compact, it has a wide movable range of 16mm, ensuring sufficient transport space for workpieces, and it is easy to integrate into devices. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
○Warping Liquid crystal glass, solar cells ○Flatness Average measurement at a rough surface with a φ0.5mm spot ○Thickness Silicone rubber, rubber, discs, films, coatings on films, semiconductor wafers, metal foils, grease, adhesives ○Height measurement Ceramics, soft metals ○Film thickness measurement Photoresist, paste films, thick film formations such as dried chip resistors ○Positioning For automatic focusing
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■Features of the Non-Contact Air Servo Measuring Device (Product Name: Air Scanner)■ 1) Non-contact measurement via an air film, which does not damage the measured object. 2) High precision with a scale resolution of 0.02μm and a repeatability of 2σ±0.2μm. 3) Highly environmentally resistant, capable of measuring even in high temperature and humidity conditions. 4) Can measure any material as long as the measured object is a solid that does not allow air to pass through. 5) A large measurement range of 10mm with high resolution (the movable range is 16mm). 6) The measurement area (nozzle diameter) can be adapted from φ0.5mm to your desired size. □Measurement Examples□ Measurement of flatness, thickness, and height of LCD glass, metal foils, transparent films, semiconductor wafers, ceramics, soft metals, discs, film thickness formations, paste films, adhesives, organic elastomers, etc. □Application Examples Using Air Scanner□ Sensors for automatic focusing (not affected by color or material), sensors for processing equipment (strong against environmental pressures due to internal pressure). *Management of supply air (dehumidification) is necessary. ■Features of the Precision Air Positioning Device (Product Name: Air Stepper)■ 1) High-speed positioning is possible with complete non-contact (no friction or wear). 2) No heat generation despite high-speed operation, allowing for energy savings in factory air conditioning systems. 3) Torque adjustment is possible through pressure control.
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