エスイーエス研究所 Company Profile

Super Engineering Serve Labo aims for the development of highly precise and ultra-accurate non-contact air servo devices, always anticipating five years into the future.

■Features of the Non-Contact Air Servo Measuring Device (Product Name: Air Scanner)■ 1) Non-contact measurement via an air film, which does not damage the measured object. 2) High precision with a scale resolution of 0.02μm and a repeatability of 2σ±0.2μm. 3) Highly environmentally resistant, capable of measuring even in high temperature and humidity conditions. 4) Can measure any material as long as the measured object is a solid that does not allow air to pass through. 5) A large measurement range of 10mm with high resolution (the movable range is 16mm). 6) The measurement area (nozzle diameter) can be adapted from φ0.5mm to your desired size. □Measurement Examples□ Measurement of flatness, thickness, and height of LCD glass, metal foils, transparent films, semiconductor wafers, ceramics, soft metals, discs, film thickness formations, paste films, adhesives, organic elastomers, etc. □Application Examples Using Air Scanner□ Sensors for automatic focusing (not affected by color or material), sensors for processing equipment (strong against environmental pressures due to internal pressure). *Management of supply air (dehumidification) is necessary. ■Features of the Precision Air Positioning Device (Product Name: Air Stepper)■ 1) High-speed positioning is possible with complete non-contact (no friction or wear). 2) No heat generation despite high-speed operation, allowing for energy savings in factory air conditioning systems. 3) Torque adjustment is possible through pressure control.