A precise displacement gauge that can measure any material as long as it is a solid that does not allow air to pass through.
Non-contact measurement through an air film causes no workpiece damage. Scale resolution is 20 nm. High reproducibility ±2σ = ±0.2 μm. No restrictions on the material of the measured object. Highly environmentally resistant, capable of measurement even in high temperature and humidity. Measurement range is 10 mm. Movement range is 16 mm. Averaged measurement on rough surfaces with a φ0.5 mm pot.
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basic information
A precise displacement gauge that can measure any material as long as it is a solid that does not allow air to pass through. Examples of solids: adhesive tape liquid crystal glass ceramics foil semiconductor wafers disks film thickness forming bodies paste films organic elastomers such as silicone rubber and rubber various types of films
Price information
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Delivery Time
※1.5 months or more
Applications/Examples of results
Adopted for thickness measurement devices of semiconductor wafers. Adopted for shape measurement devices of large LCD glass. Thickness measurement of ultra-thin metal foils. Thickness measurement of crystals and step measurement of small LCD glass. Thickness measurement of adhesive tapes and adhesive films. Materials such as carbon-based films that do not reflect laser.
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Company information
■Features of the Non-Contact Air Servo Measuring Device (Product Name: Air Scanner)■ 1) Non-contact measurement via an air film, which does not damage the measured object. 2) High precision with a scale resolution of 0.02μm and a repeatability of 2σ±0.2μm. 3) Highly environmentally resistant, capable of measuring even in high temperature and humidity conditions. 4) Can measure any material as long as the measured object is a solid that does not allow air to pass through. 5) A large measurement range of 10mm with high resolution (the movable range is 16mm). 6) The measurement area (nozzle diameter) can be adapted from φ0.5mm to your desired size. □Measurement Examples□ Measurement of flatness, thickness, and height of LCD glass, metal foils, transparent films, semiconductor wafers, ceramics, soft metals, discs, film thickness formations, paste films, adhesives, organic elastomers, etc. □Application Examples Using Air Scanner□ Sensors for automatic focusing (not affected by color or material), sensors for processing equipment (strong against environmental pressures due to internal pressure). *Management of supply air (dehumidification) is necessary. ■Features of the Precision Air Positioning Device (Product Name: Air Stepper)■ 1) High-speed positioning is possible with complete non-contact (no friction or wear). 2) No heat generation despite high-speed operation, allowing for energy savings in factory air conditioning systems. 3) Torque adjustment is possible through pressure control.